本文研究主旨為找出良好的加速度訊號，應用於線性平台系統上，達到高精密控制的需求，而本文實驗用的加速規為壓電式加速規和電容式加速規作為量測系統的加速度與研究應用。
研究動機是改善壓電式加速規無法量測低頻直流成份，因此可以判斷出在大多數的伺服系統上，壓電式加速規是不適用的；而在電容式加速規具有完整之量測能力，但因電容式加速度訊號雜訊較大，且動態頻寬較小。因此， 本論文主要的貢獻在於實現提出數位化整合式加速規來量測加速度及設計加速度觀測器方式來觀測加速度來解決此問題，前者為將電容式與壓電式加速規進行數位化整合來量測低頻加速度成份，後者利用壓電式加速規量測加速度訊號與光學尺量測之位置訊號觀測出低頻加速度成份。本文將此提出的方法與壓電式、電容式加速規比較，並應用於加速度干擾補償器(disturbance observer based on acceleration signal, ADOB)之控制性能比較。
本文實驗平台以無刷伺服馬達結合導螺桿組成之線性平台，進行直線運動定位控制驗證。採用TI TMS320C6713 DSP與Xilinx可程式閘陣列(FPGA)結合而成之控制器硬體核心，並以C語言與硬體描述語言(VHDL)作為控制器設計之發展工具。本文搭配加速度干擾補償器(ADOB)，將數位化整合式加速規及加速度觀測器設計方法應用於實驗平台的位置控制，並且由實驗結果可知本方法具有實用性。

This paper is to find a good acceleration signal achieve high-precision control of demand in the linear systems. Using piezoelectric accelerometer and capacitive accelerometer to measure the acceleration and research applications.
Research on Motivation is to improve the piezoelectric accelerometer possesses excellent dynamics, it cannot measure the dc acceleration. On the other hand, the capacitive accelerometer is able to measure the dc acceleration, but its singal quality is poor and dynamic behavior is inadequate.Therefor,the main contribution of this paper is proposes the digitally integrated accelerometer and the observer to estimate the acceleration. The first one based on the digitally integrated provided by the piezoelectric accelerometer and the capacitive accelerometer. Another one based on the information on the position and an acceleration signal provided by the piezoelectric accelerometer, an observer is devised to estimate the low-frequency components of acceleration that cannot be accurately measured by the piezoelectric accelerometer. In other words, the observer is able to provide an acceleration estimate that is superior to those provided by the piezoelectric and the capacitive accelerometers. Experimental studies with a brushless servomotor compare the observed acceleration with other approaches. Moreover, using a disturbance observer based on the acceleration (ADOB), those acceleration signals are applied to the brushless servomotor in order to further verify the effectiveness of the proposed observer.
This paper experimental systems: one contains a brushless servo motor and a commercially available single-axis ball screw. In the experimental system, the control kernel is a DSP/FPGA system, and the C language and VHDL are utilized as developing tools for the servo control system. Experiments of the digitally integrated accelerometer and acceleration observer design method using a disturbance observer based on the acceleration (ADOB) of the control performance comparison and proven to have better transient and steady responses than past approaches.

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