本研究旨在以低成本開發精微菲涅爾透鏡(Fresnel lens)之製程技術，並應用於建構光電及生醫領域系統所需之微細光斑，以及建立精微透鏡製造技術之自主能力。研究之初，先行開發一部左右對稱設計的「高速高精度錯置式切削系統」，使微細軸件及單晶鑽石刀具分別安置於高速主軸(35,000rpm)及精密XY位移平台上。透由刀具與工件的位置交換，對小直徑的透鏡模仁素材提供高速原子差排運動，使菲涅爾透鏡模仁因高速切削而獲致高平整度(Flatness)及良好表面粗糙度的光學等級結構表面。菲涅爾透鏡之焦距、外徑、最大深度與最大節距設計分別為1.0mm, 0.9mm, 0.1mm和0.05mm。模仁切削的實驗結果顯示，在10000rpm主軸轉數，1μm切削深度及0.10.05mm/min的多段式進給切削條件下，能成功製作出Ra25nm的表面粗糙度之精微菲涅爾透鏡模仁；而在160mm/s的射出速度，110°C模具溫度以及140MPa的保壓壓力下，能以壓克力材料成功射出成形精微菲涅爾透鏡。透由簡易光學系統量測發現，其透鏡光斑直徑可達2.4μm，證實本研究開發之製程技術，能精確研製精微菲涅爾透鏡，深具商化價值。

This study presents a novel, economical and efficient processes technique for precisely machining the micro Fresnel lens mold-core to produce the micro Fresnel lens made of PMMA for creating a micro light-spot in the applied fields of electro-optical and biomedical system and establishing the autonomous technology of micro lens fabrication. At the beginning, a high-speed, -precision misplaced machining system with bilateral symmetry is first developed and proposed. The micro workpiece is clamped on the high-speed spindle (35,000rpm) on the Z-axis while the diamond tool is located on the working tank on the XY-axis. The tool position and the workpiece position is exchanged whereby the micro lens mold-core can be machined under a required high-speed condition. High-speed motion of dislocation atom-by-atom decreases the lattice resistance and improves the surface roughness of the machined surface, thereby, creating a structure surface with an excellent flatness and surface roughness. The focal length, the outter diameter, the maximum depth and the maximum pitch of the designed Fresnel lens are 1.0mm, 0.9mm, 0.1mm and 0.05mm, respectively. Experimental results demonstrated that a Fresnel lens mold-core can be machined successfully with Ra25nm in surface roughness when using the conditions of speed of 10000rpm, depth of cutting of 1μm and multi-stage feed-rates of 0.10.05mm/min, respectively. The micro Fresnel lens made of PMMA has been efficiently formed by using micro injection modeling under the condirions of injection speed of 160mm/s, mold temperature of 110°C and packing pressure of 140MPa, respectively. The diameter of light-spot is measured and obtained at 2.4µm by using a simple leaser optical system confirming the validity of potential commercial development of the proposed processes technique. This development is expected to contribute substantially to the electro-optical and biomedical engineering industries.

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