壓電感測元件產生的電量微小，並容易受到雜訊影響，因此有Integrated Electronics Piezo-Electric（IEPE）型式感測器的發展。此型式的感測器內部整合了放大器，使得原本高阻抗的輸出變成低阻抗的輸出，提供更好的抗雜訊能力。
本研究目的為研發一IEPE型式的急動度感測器，並回授IEPE急動度感測，對撓性機械人關節進行雙向控制。本雙向控制方法藉由回授急動度訊號，以抑制關節撓性導致的抖動，達到主從兩端位置同步與力量重現的控制目標。此外，進一步擴展運動觀測器，以觀測系統的負載端位置、速度及加速度訊號，以免除負載端位置感測器的需求。
本研究採用實驗室成員研發設計之撓性關節系統平台，使用IntervalZero公司的RTX64即時作業系統，以電腦為主站，透過乙太網控制自動化技術 (EtherCAT) 連接其它從站，例如台達電子的ADC、研華的 DAC與德國Sensodrive GmbH的馬達關節。透過微軟的Visual Studio編譯環境，以C++程式語言發展控制程式。
由實驗結果可知，本研究所設計之急動度感測器可以有效地感測急動度，所設計的擴展式運動觀測器可用於觀測負載端的位置、速度與加速度。此外，本文所提出之方法能有效地改善關節撓性造成的抖動，提升系統性能。本研究以實驗的方式與其它控制方法進行比較，顯示本研究方法的有效性。

The amount of electric charge generated by piezoelectric sensing elements is very small and is easily affected by noise. Therefore, Integrated Electronics Piezo-Electric (IEPE) sensors have been developed. This type of sensor integrates an amplifier inside, turning the high-impedance output into a low-impedance output and providing better noise immunity.
The purpose of this research is to develop an IEPE jerk sensor and to feedback jerk to flexible robot joints for bilateral control. This bilateral control method suppresses vibrations caused by flexible robot joints by feeding back jerk signals, achieving the control goals of position synchronization and force reproduction. In addition, an extended kinematic observer is used to observe the load-side position, velocity and acceleration signals of the system, eliminating the necessity for a load-side position sensor.
This research uses an experimental system with flexible robot joints, which was designed and assembled by members of the laboratory. It uses the RTX64 real-time operating system of IntervalZero. The computer is used as the master station and connected to other slave stations through Ethernet for Control Automation Technology (EtherCAT), such as Delta Electronics’ ADC, Advantech's DAC and robot joints from Germany's Sensodrive GmbH. Control programs and developed in C++ programming language through Microsoft's Visual Studio integrated development environment.
Experimental results show that the IEPE jerk sensor designed in this research can effectively measure jerk, and the extended kinematic observer can be used to observe the load-side position, velocity and acceleration. In addition, the proposed method proposed in this article can effectively diminish the vibration caused by joint flexibility and improve system performance. This research compares with other control methods to show the effectiveness of this proposed method.

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