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研究生： 段憶祖
Yi-Tsou Tuan
論文名稱： 整合多孔矽及奈米碳管之微型直接甲醇燃料電池研製
Development of uDMFC with integrated porous silicon and carbon nanotube
指導教授： 楊啟榮
學位類別： 碩士
Master
系所名稱： 機電工程學系
Department of Mechatronic Engineering
論文出版年： 2011
畢業學年度： 99
語文別： 中文
論文頁數： 152
中文關鍵詞： 微型直接甲醇燃料電池 、多孔矽 、奈米碳管
論文種類： 學術論文
相關次數： 點閱：112  下載：4 
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    • 隨著科技的進步與環保意識的高漲，人類亟需一種乾淨、無汙染的能量來源，以應用於現今生活中不可或缺的可攜式電子產品。直接甲醇燃料電池(direct methanol fuel cell, DMFC)，其具有操作溫度低，啟動速度快，能量密度高，燃料攜帶方便，燃料取得容易等優點。因此，本研究希望將燃料電池微型化(micro DMFC, DMFC)，並簡化其組成元件，降低製造成本，以實現整合於可攜式電子產品中的可能性。為了降低性能優異燃料電池所需的製造成本，本研究以低成本的「TMAH濕蝕刻技術」以及「光輔助電化學蝕刻技術」，製作微型直接甲醇燃料電池雙極板結構。整個研究重點包括：(1)具微流體系統之流場板製作；(2)整合於微流道底部之奈米結構擴散層製備；(3)雙極板白金觸媒層之塗佈；(4)Nafion質子交換膜(PEM)前處理；(5)膜電極組壓合製程；(6)甲醇燃料電池之元件組裝；(7)電池特性檢測與發電效率之評估等項目。
    本研究已成功使用「TMAH濕蝕刻技術」製造出深度達250 um之微型流道結構，並於微流道底部直接以「光輔助電化學蝕刻技術」，製作出微米級直徑10-20 um之多孔結構，並在孔洞內利用熱裂解CVD方式成長線徑約為70 nm的奈米碳管。實驗結果顯示，僅具有多孔矽結構之uDMFC，其最大功率為20.2 uW/cm2，以碳紙作為擴散層之對照組的uDMFC，所能輸出的最大功率密度為16.2 uW/cm2，經實驗證明多孔矽實驗組，其最大功率密度已超越碳紙對照組，本研究已成功實現利用多孔矽來取代碳紙擴散層。此外，結合奈米碳管結構之DMFC，其最大功率達到226 uW/cm2，由此可證透由奈米碳管大比表面積及驅除CO2能力的優勢，可將uDMFC的功率密度提升十倍以上。

    中文摘要 I 總目錄 II 圖目錄 V 表目錄 XIII 第一章 緒論 1 1.1 前言 1 1.2 微機電系統簡介 3 1.3 燃料電池 5 1.3.1燃料電池的優點 5 1.3.2燃料電池的分類 6 1.4 質子交換膜燃料電池 8 1.4.1直接甲醇燃料電池之工作原理 9 第二章 文獻回顧 14 2.1 微/奈米機電系統技術應用於燃料電池製作 14 2.2 結合多孔矽之燃料電池製作 19 2.2.1 多孔矽簡介 19 2.2.2 多孔矽蝕刻概論 23 2.2.3 光輔助電化學蝕刻之多孔矽製備法 27 2.2.4 多孔矽於燃料電池之應用 29 2.3 結合奈米碳管於燃料電池製作 36 2.3.1 奈米碳管簡介 36 2.3.2 化學氣相沈積法成長奈米碳管 40 2.3.3 奈米碳管應用於燃料電池 43 2.4 極化曲線(Polarization Curve) 52 2.5 研究動機 55 第三章 實驗設計與規劃 56 3.1實驗規劃 56 3.2 實驗製程 59 3.2.1 圖案定義製程 59 3.2.2 流道深蝕刻製程 65 3.2.3 光輔助電化學蝕刻製程 70 3.2.4 奈米碳管之成長 74 3.2.4 直接甲醇燃料電池製備流程 77 3.3 實驗設備 81 第四章 結果與討論 88 4.1 流道深蝕刻製程 88 4.2 多孔矽擴散層蝕刻製程 98 4.3 奈米碳管成長暨觸媒沉積 107 4.4 直接甲醇燃料電池組裝與性能測試 115 4.4.1 直接甲醇燃料電池組裝流程 115 4.4.2 直接甲醇燃料電池性能測試 116 第五章 結論與未來展望 128 5.1 結論 128 5.2 未來展望 130 參考文獻 131

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