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研究生： 許 元錫
論文名稱： 交錯型矽奈米線場效電晶體之製備與應用
指導教授： 王禎翰
學位類別： 碩士
Master
系所名稱： 化學系
Department of Chemistry
論文出版年： 2013
畢業學年度： 101
語文別： 中文
論文頁數： 59
中文關鍵詞： 生物感測器 、交錯型矽奈米線場效電晶體
論文種類： 學術論文
相關次數： 點閱：300  下載：18 
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    • 矽奈米線場效電晶體 (silicon nanowire field-effect transistor, SiNW-FET) 生物感測器，具有高靈敏度 (sensitivity)、專一選擇性 (selectivity)、即時回應 (real-time response)、及無標記檢測 (label-free detection) 等的優異特性，目前在生物感測研究方面有著非常好的發展。本論文致力於矽奈米線場效電晶體改良與製備，使其發展成雙分子偵測系統。
    傳統上矽奈米線場效電晶體的感測，多是針對單一分子做感測，而在本研究中，我們遵循由下而上 (bottom-up) 的製程方法，並結合了選擇性表面修飾 (selective surface modification, SSM)，經過多道程序製作出交錯型矽奈米線場效電晶體。在實驗中，我們使用了黃光製程、矽奈米線成長及轉印、電子微影製程以及防水層製作等步驟，多次嘗試後成功得到了交錯型矽奈米線場效電晶體 (cross-type SiNW-FET)，最後使用Avidin以及GST兩種待測分子，測量其電訊號變化證實元件的可用性，並建立出了一套可行的製程方法。利用此項新興元件做雙分子的偵測，我們將可做許多兩種有關聯性分子的研究。

    口試委員簽名表 i 謝誌 ii 摘要 iii Abstract iv 目錄 vi 圖目錄 viii 簡稱用語對照表 x 第一章 序論 1 1-1 矽奈米線場效電晶體之生物感測器 1 1-1.1 工作原理與簡介 1 1-1.2 製備方法與發展 5 1-2 交錯型矽奈米線場效電晶體之製備 8 1-2.1 研究動機 8 1-2.2 實驗構思與方向 10 第二章 實驗方法 12 2-1 金奈米粒子合成 12 2-2 矽奈米線合成 14 2-3 氣相連接分子修飾 18 2-4 電晶體元件製程 20 2-4.1 外層電極 20 2-4.2 矽奈米線放置 22 2-4.3 內層電極 23 2-4.4 防水層 25 2-5 液相受體分子修飾 26 2-6 感測溶液槽製備 28 2-7 電訊號量測系統建立 29 2-8 實驗儀器 32 第三章 實驗結果與討論 36 3-1 金奈米粒子合成 36 3-2 矽奈米線合成 39 3-3 氣相修飾之矽奈米線 44 3-4 電晶體元件製程結果 46 3-5 電訊號量測結果 52 第四章 總結 57 參考文獻 58

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