隨著科技產品不斷推陳出新，生活中不時可見許多攜帶式與穿戴式之電子產品，而電池之需求亦隨之增加。全固態薄膜電池具有良好之安全性與高能量密度，於未來之發展極具潛力。
本實驗之目的為製作全固態鋰離子薄膜電池，以ruby mica scratchfree 作為基板，利用直流濺鍍(direct sputtering; DC sputtering)沉積鉑金屬作為電流收集器，再以射頻磁控濺鍍法(radio frequency magnetron sputtering; RF magnetron sputtering)進行陰極薄膜鋰鈷氧化物(lithium cobalt oxide; LiCoO2)與固態電解質鋰磷氧氮化物(lithium phosphorous oxynitride; LiPON)之製備，並以熱蒸鍍法蒸鍍鋰金屬薄膜與aromatic polyurea，分別作為陽極材料與保護膜。
陰極材料藉由高溫爐(furnace)與快速熱退火爐(rapid thermal annealing; RTA)，以不同之升溫速率或不同之升溫時間，進行熱處理，使其具晶相。藉x光繞射儀(x-ray diffraction; XRD)分析晶相；以掃描電子顯微鏡(scanning electron microscope; SEM)觀測表面之形貌；並以充放電量決定陰極材料之電化學特性。
於固態電解質部分，藉由射頻磁控濺鍍法(RF magnetron sputtering)濺鍍LiPON薄膜，而完成之LiPON薄膜則置放收套箱內，以加熱板(hot plate)對LiPON薄膜作不同溫度之熱處理，並於熱處理後進行阻抗量測，計算LiPON薄膜之離子導電度。
藉由RTA於升溫時間2 min下，熱處理陰極材料LiCoO2薄膜。並以加熱板於200°C熱處理固態電解質LiPON薄膜，再以蒸鍍機蒸鍍鋰金屬，以此些方式所組成之薄膜電池可進行充放電量測並點亮LED燈。

In our life, there are more and more portable electronic devices and wearable electronic devices when the technology is improving all the time. Therefore, the requirement of batteries is more important now. Because all-solid-state thin film battery feature with good safety and high energy density, it is much potential for the development of future work.
In our experiment, we try to make all-solid-state thin film batteries. We use ruby mica scratchfree to be the substrate. First, we deposit platinum by direct current sputtering as a current collector. Then, we deposit lithium cobalt oxide (LiCoO2) cathode material and lithium phosphorus oxynitride (LiPON) solid electrolyte on the platinum current collector by radio frequency sputtering. Finally we fabricate the lithium metal and aromatic polyurea to be the anode material and encapsulation by thermal evaporation.
We use the furnace and rapid thermal annealing (RTA) to heat the cathode material, and control the heating rate of machine. We use x-ray diffraction to analyze the crystalline structure. Scanning electron microscope is used to observe the surface morphology, and capacity test is able to decide the chemical properties of cathode material.
In the part of solid electrolyte, we use hot plate to heat the LiPON film in different temperature. And we measure the electrochemical impedance spectroscopy to calculate the ion conductivity.
Using the rapid thermal annealing (RTA) at the rate of 260oC/min is a good way to heat the LiCoO2 film. And we use hot plate at the 200oC to do the heat treatment of LiPON film. Finally, we use the thermal evaporation to evaporate the lithium metal. The complete all-solid-state thin film battery can do the cycle test and light the LED.

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