陽極氧化鋁因具有良好的物理特性與化學特性，而且低成本與製造容易。廣泛應用在催化、化學與生物感測器、自組裝的模板、過濾器、奈米流體晶體管、濕度感測器、細胞培養、超級電容器。奈米壓痕技術由於據有奈米位移解析度，以及量測方法之均一性與簡易性等優點，故近年來被廣泛被應用於各種類型之材料測試上，應用層面可包含材料之彈性模數、硬度(降伏強度)、破壞特性等研究領域。本研究運用陽極氧化處理技術製作陣列式不同孔徑之奈米孔洞，並以奈米壓痕機(Nanoidentation)量測陣列式不同奈米孔洞之機械強度，並探討五種不同奈米孔洞機械強度之差異。奈米孔洞其孔徑在 50nm、150nm、250nm、350nm、450nm 。並使用奈米壓痕量測表面微結構之機械強度，並探討孔徑變化與機械強度之間的關係。其中彈性模數、硬度在壓痕速率0.05um/s下差異性相當小，但是在壓痕速率0.025um/s下時會發現差異性相當大。而回彈量與壓痕速率成正比。潛變與壓痕速率成反比，與孔徑大小無關係。

Because Anodized Aluminum Oxide (AAO) has good physical properties and chemical properties, low-cost and easy to manufacture, it was widely used in catalysis, chemical and biological sensors, self-assembled templates, filters, nanofluid transistors, humidity sensors, cell culture and super capacitors. Due to nanometer displacement resolution, and the advantage of simplicity, nanoindentation has been used widely apply in various types of materials testing which includes the determination of elastic modulus, hardness (yield strength). The study investigates the mechanical properties of AAO with different size of nanopores.
Array of different size of nanopores was made using anodized technology. The diameters of nanopores were 50 nm, 150 nm, 250 nm, 350 nm and 450 nm. The mechanical strength was measured using nanoindentation. The relationship between the different size of nanopores and the mechanical strength was investigated. The study found that the speed of nanoindentation was 0.05um/s which had no significant effect on the mechanical properties, such as elastic modulus and hardness. But for the speed of nanoindentation was 0.025um/s which had big significant effect on the mechanical properties. Rebound rate was proportional to the speed of nanoindentation. Creep rate was inversely proportional to the speed of nanoindentation. There is no relationship between creep rate and size of nanopores.

[1] Noda-shi and Chiba-ken, “On the Basic Concept of Nano-Technology ,” Tokyo Science University, (1974).
[2] 劉如熹、辛嘉芬、陳浩銘，奈米材料的製作與應用─陽極氧化鋁膜及奈米線製作技術，全華圖書股份有公司，2008。
[3] A. P. Li, F. Muller, A. Birner, K. Nielsch, and U. Gosele, Appl. Phys. A, “High aspect ratio microstructures based on anisotropic porous materials” (2002).
[4] M. R. Falvo, G. J. Clary, R. MII. Taylor, V Chi, FP Brooks, S. Washburn, R Superfine, Nature,” Bending and buckling of carbon nanotubes under large Strain”, (1997).
[5] H. Masuda, and M. Satoh, “Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask”, Jpn. J. Appl. Phys, 35, 26-29,(1996).
[6] Ch. R. Martin, “Membrane-Based Synthesis of Nanomaterials”, Chemistry
of Materials, 8, 1739-1746 (1996).
[7] D. Routkevitch, “Nonlithographic Nano-Wire Array Fabrication, physics,and Device Applications”, IEEE Trans. Electron Devices 43, 1646-1657 (1996).
[8] H. Mori, “Electron Density Distribution in a Single Crystal of Mx[x=0.045(5)]”, Phys Rev. B, 65, 092507.1-092507.4 (2002).
[9] A. M. Morals, and C. M. Lieber, “A Laser Ablation Method for the Crystalline Semiconductor Nanowires,” Science, 279, 208-211 (1998).
[10] A. Moroz, “Tree-Dimensional Complete Photonic-Band-gap Structures in the Visible”, Rev. Lett., 83, 5274-5277 (1999).
[11] D. M. Hartmann, and M. Heller, “Selective DNA Attachment of Micro-and Nanoscale Particles to Substrates”, J. Mater. Res., 17, 473-478 (2002).
[12] C R. Martin, “Nanomatrials: A Membrane Based Synthetic Approach”, Science, 266, 1961-1966, (1994).
[13] A. Yamaguchi, F. Uejo, T. Uchida, Y. Tanamura, T. Yamashita, and N. Teramae “Self-assembly of a Silica-Surfactant Nanocomposite in a Porous Alumina Membrane”, NatMater, 3, 337–341 (2004).
[14] A. Heilmann, N. Teuscher, A. Kiesow, D. Janasek, and U. Spohn, ”Nanoporous Aluminum Oxide as Novel Support Material for Enzyme Biosensors”, Journal of Nanoscience and Nanotechnology, 3,375–379 (2003).
[15] L. Viassiouk , A. Krasnoslobodtsev , S. Smirnov, and M. Germann ”Direct Detection and Separation of DNA using Nanoporous Alumina Fitters”, Langmuir, 20, 9913-9915 (2004).
[16] GH. Mihailescu, S. Pruneanu, S. Neamtu, and L. Olenic, “Alumina Membranes Used as Molecular Filters for Human red Blood Cells and Bovine Serum Albumin”, Phys, 471-474 (2001).
[17]楊鎮宇，電化學法製備微奈米銅線技術與應用，成功大學奈米科技暨微系統工程研究所，2012。
[18]陳銘心，多孔有序陽極氧化鋁在細胞培養之應用，龍華科技大學，工程技術研究所，2011。
[19]廖泰翔，氣體輔助熱壓陽極氧化鋁模具製作生醫檢測元件之研究，臺灣大學，機械工程學研究所，2013。
[20]謝政良，以雙層奈米多孔隙陽極氧化鋁為感測材料及具埋藏電極之電容式濕度感測器，清華大學，動力機械工程學系，2013。
[21]劉林益，陽極氧化鋁基材製程改善及其應用於固態超級電容器之研究
臺灣大學，機械工程學研究所，2013。
[22]陳智堯，以電流控制方式快速製備孔洞間距400至500奈米之陽極氧化鋁模板，國立中央大學，材料科學與工程研究所，2013。
[23] Te-Hua Fang , Tong Hong Wang , Chien-Hung Liu , Liang-Wen Ji , and Shao-Hui Kang” Physical Behavior of Nanoporous Anodic Alumina Using Nanoindentation and Microhardness Tests,” Nanoscale Research Letters- Springer, 410–415(2007).
[24] Bengogh, Stuart, British Patent, 223994, (1923).
[25] F. Keller, M.S. Hunter, and D.L. Robinson “Structural features of oxide coating on aluminum, “Journal of the Electrochemical Society, Vol.100, pp.11-419, (1953).
[26] J.P. O’Sullivan and G.C. Wood, “The Morphology and Mechanism of Formation of Porous Anodic Films on Aluminum,” Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, Vol.317, pp.511-543, (1970).
[27]G.E. Thompson and G. C. Wood, “Porous anodic film formation on aluminum,” Nature, Vol. 290.pp.230-232, (1981).
[28] G.E. Thompson and G. C. Wood, ” Corrosion: Aqueous Process and passive films, “Treaties on Material Science and Technology, Academic Press Inc.(London) Ltd., Vol.23, Chap.5, pp.206, (1983).
[29] Hideki Masuda and Kenji Fukuda, “Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina,” Science, Vol.268, pp.1466-1468, (1995).
[30]A. P. Li, F. Muller, A. Birner, K. Nielsch, and U. Gosele ,”Hexagonal pore arrays with a 50-420nm interpore distance formed by self-organization in anodic alumina, ”Journal of Applied Physics,Vol.84, pp.6023-6026, (1998).
[31]O. Jessensky, F. Muller, and U. Gosele,” Self-organized formation of hexagonal pore arrays in anodic alumina,” Applied Physics Letters, Vol. 73, pp.1173-1175, (1998).
[32] A.P. Li, F. Muller, A. Birner, K. Nielsch,and U. Gosele,”Polycrystalline nanopore arrays with hexagonal ordering on aluminum” The Journal of Vacuum Science and Technology A,Vol.17, pp.1428-1431, (1999).
[33] Hideki Masuda, Masato Yotsuya, Mari Asano, and Kazuyuki Nishio, ”Self-repair of ordered pattern of nanometer dimensions based on self-compensation properties of anodic porous alumina, ”Applied Physics Letters,Vol.78, pp.826-828, (2001).
[34] Nai-Qin Zhao, Xiao-Xue Jiang, Chun-Sheng Shi, Jia-Jun Li, Zhi-Guo Zhao, Xi-Wen Du, ”Effects of anodizing conditions on anodic alumina structure, ”Journal of Materials Science,Vol.42, pp.3878-3882, (2007).
[35] H. Hertz, “Ueber die Ber ü hrung Fester Elastischer Körper”, J. Reine und Angewandte Mathematik, 92, pp.156-171, (1882).
[36] I. N. Sneddon, “The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile,” Int. J. Engng. Sci., 3, 47-57, (1965).
[37] W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res., 7, 1564-1583, (1992).
[38] T. Y. Tsui, W. C. Oliver and G. M. Pharr, “Influences of stress on the
measurement of mechanical properties using nanoindentation：Part I. Experimental studies in an aluminum alloy,” J. Mater. Res., 11,752-759, (1996).
[39] A. Iost and R. Bigot, “Indentation size effect：reality or artifact?” J. Mater. Sci., 31, 3573-3577, (1996).
[40] R. Saha, and W. D. Nix, “Effects of the substrate on the determination of thin film mechanical properties by nanoindentation,” Acta Mater. , 50, 23-38, (2002).
[41] R. B. King, “Elastic analysis of some punch problems for a layered medium,” Int. J. Solids Struct. , 23, 1657-1664, (1987).
[42] D. B. Marshall and B. R. Lawn, “Indentation of brittle materials, Microindentation techniques in Materials Science and Engineering,” ASTM STP 889, 26-46, (1986).
[43] S. Yang, Y. W. Zhang and K. Zeng, “Analysis of nanoindentation reep for polymeric materials,” J. Appl. Phys., 95, 3655-3666, (2004).
[44] D. B. Marshall and A. G. Evans, “Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interface delamination,” J. Appl. Phys., 56, 2632-2638, (1984).
[45] A. A. Volinsky, N. R. Moody and W. W. Gerberich, “Interfacial toughness measurements for thin films on substrates,” Acta Mater., 50, 441-466, (2002).
[46] A. A. Volinsky and W. W. Gerberich, “Nanoindentation techniques for assessing mechanical reliability at the nanoscale,” Microelect. Eng., 69, 519-527, (2003).
[47] J. Zheng, M. Kato, S. Takezoe and K. Nakasa, “Evaluation of wear resistance of sputtered amorphous SiCN film and measurement of delamination strength of film by micro edge-indent method,” Journal of the Society of Materials Science, Japan, 54, 1022-1029, (2005).
[48] J. M. Moon, A. Wei, J. Phys. Chem. B109, 23336, (2005).
[49] L. Young, Anodic Oxide Films; Academic Press: New York, (1971).
[50] O. Jessensky, F. Műller, U. Gősele, Appl. Phys. Lett., 72, 1173, (1998).
[51] N. A .Stillwell, D. Tabor, “Elastic Recover of Conical Indentations”, Proc. Phys. Soc. London, 78, pp. 169-179, (1961).
[52] A. K. Bhattacharya, W. D. Nix, “Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates”, International Journal of Solids and Structures, 24, pp.1287-1298, (1988).
[53] A. K. Bhattacharya, W. D. Nix, “Finite Element analysis of cone indentation”, International Journal of Solids and Structures, 27, pp. 1047-1058, (1991).
[54] H. F. Wang, H. Bangert, “Three-dimensional Finite Element Simulation of Vickers Indentation on Coated Substrates.” Mater. Sci. Eng., A163, pp. 43-50, (1993).
[55] M. Lichinchi, C. Lenardi, J. Haupt, and R. Vitali, “Simulation of Berkovich nanoindentation experiments on thin films using finite element method.” Thin Solid Films, 333, pp. 278-286, (1998).
[56] Thomas Chudoba, “Introduction of the Universal Nanomechanical Tester UNAT.” ASMEC, (2013).