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Author: 邱繼賢
Chiu, Chi-Hsien
Thesis Title: 一種急跳度精微電解技術應用於高溫耐蝕合金之微孔型結構製造研究
Study on a micro-ECM technology with jerk movement for machining micro holed-structures on high-temperature corrosion-resistant alloy steel.
Advisor: 陳順同
Chen, Shun-Tong
Committee: 宋震國
Sung, Cheng-Kuo
趙崇禮
Chao, Choung-Lii
張天立
Chang, Tien-Li
蔡俊毅
Tsai, Chun-Yi
蔣欣翰
Chiang, Hsin-Han
陳順同
Chen, Shun-Tong
Approval Date: 2023/07/17
Degree: 碩士
Master
Department: 機電工程學系
Department of Mechatronic Engineering
Thesis Publication Year: 2023
Academic Year: 111
Language: 中文
Number of pages: 135
Keywords (in Chinese): 精微電解急跳度運動微孔型結構內擴內縮
Keywords (in English): micro-ECM, jerk movement, micro holed-structures, inward expansion, inward shrink
Research Methods: 實驗設計法次級資料分析調查研究主題分析
DOI URL: http://doi.org/10.6345/NTNU202301544
Thesis Type: Academic thesis/ dissertation
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  • 摘要 i Abstract ii 致謝 iii 目錄 iv 表目錄 vii 圖目錄 viii 符號說明 xi 第一章 緒論 1 1.1前言 1 1.2文獻回顧 3 1.2.1現今產業之微結構應用文獻 3 1.2.2微結構加工之相關文獻探討 9 1.2.3精微電化學技術發展及應用 14 1.3研究動機 15 1.4研究目的 16 1.5研究方法 17 第二章 實驗原理及應用 20 2.1電化學原理 20 2.2急跳度 22 2.3法拉第定理 23 2.4 Parylene薄膜真空CVD沉積製程原理 25 第三章 實驗設備 26 3.1實驗與加工設備 26 3.1.1 CNC線切割機 26 3.1.2 CNC數值控制綜合加工機 26 3.1.3平面磨床 27 3.1.4波形產生器 28 3.1.5電壓放大器 29 3.1.6高速鑽削旋轉主軸 29 3.2實驗量測設備 31 3.2.1光學顯微鏡 31 3.2.2掃描式電子顯微鏡 31 3.2.3雷射共軛焦顯微鏡 32 3.3實驗材料 33 3.3.1鎳鉻鉬鋼(Ni-Cr-Mo alloy steel)試片 33 3.3.2碳化鎢鑽頭與電極 34 3.3.3硝酸鈉(NaNO3)電解液 35 第四章 實驗探討 36 4.1周面絕緣之螺旋電極製作 36 4.1.1 C型Parylene之絕緣層鍍膜 36 4.1.2電解電極之端面研磨 38 4.2特殊微孔製造流程 39 4.2.1精微同軸電解機台開發 39 4.2.2深孔啄鑽 42 4.2.3特殊微孔電解 43 4.3電解電極之加工位移路徑程式設計 45 4.3.1加速度電解路徑程式設計 45 4.3.2急跳度電解路徑程式設計 46 4.4剖切特殊微結構 48 第五章 微孔電解加工實驗 50 5.1三種波形比較 50 5.2不同頻率比較 57 5.3不同電壓比較 65 5.4不同急跳度比較 73 第六章 特殊異形微孔製作驗證 83 6.1倒錐微孔型結構 84 6.2正錐微孔型結構 87 6.3沙漏型內縮微流通道結構 90 6.4鼓脹型內擴微流通道結構 93 6.5速度與電解關係 96 第七章:結論、貢獻與展望 103 7.1研究結論 103 7.2研究成果 104 7.3研究貢獻 106 7.4未來展望 107 參考論文 109 附錄 122 1. J 0.00001 mm/s3程式路徑 122 2. J 0.00002 mm/s3程式路徑 124 3. J 0.00004 mm/s3程式路徑 126 4. J 0.00008 mm/s3程式路徑 128 5. J - 0.00002 mm/s3程式路徑 130 6. J ±0.00002 mm/s3程式路徑 132 7. J ∓0.00002 mm/s3程式路徑 134

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