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研究生： 林方媛
Lin, Fang-Yuan
論文名稱： 利用薄膜和氣-液-固三相反應成長單層二硫化鉬
Membrane-aid VLS (vapor-liquid-solid) growth of monolayer MoS2
指導教授： 陳貴賢
Chen, Kuei-Hsien
林麗瓊
Chen, Li-Chyong
學位類別： 碩士
Master
系所名稱： 化學系
Department of Chemistry
論文出版年： 2020
畢業學年度： 108
語文別： 英文
論文頁數： 103
中文關鍵詞： 二維材料 、FET 、MoS2
英文關鍵詞： FET
DOI URL： http://doi.org/10.6345/NTNU202000771
論文種類： 學術論文
相關次數： 點閱：107  下載：0 
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    • 目 錄 致謝 I Abstract II 中文摘要 III Chapter 1 Introduction 1 1.1Introduction of 2D Materials 1 1.2 Properties of MoS2 3 Chapter 2、Literature review and motivation 10 2.1 Exfoliation 10 2.1.1 Mechanical exfoliation 10 2.1.2 Chemical exfoliation 12 2.3 Chemical vapor deposition (CVD) 26 2.3.1 Gas-phase reaction 26 2.3.2 Two steps 31 2.3.3 Extremely small amount of precursor 34 2.3.4 Diffusion barrier 37 2.4 Motivation 51 Chapter 3、Material synthesis and measurement methods for 2D material 53 3.2 Material measurement methods 59 3.2.1 Optical Microscope 59 3.2.2 Raman 61 3.2.3 Photoluminescence (PL) 64 3.2.4 Atomic force microscope (AFM) 65 3.2.5 Thermogravimetric Analyzer (TGA) 68 3.2.6 X-ray Diffraction (XRD) 69 3.2.7 Field effect transistor (FET) 71 Chapter 4、Result and Discussion 74 4.1 Parameter adjustment of CVD 74 4.1.1 TGA and XRD measurement result 74 4.1.2 Different structure 76 4.1.3 Raman and PL measurement result 78 4.1.4 Proving VLS reaction 80 4.1.5 Temperature effect 81 4.1.6 SiO2 thickness effect 83 4.1.7 NaF thickness effect 87 4.1.8 Flow field effect 89 4.1.9 The time sulfur come in 90 4.2 Measurement results 92 4.2.1 AFM measurement result 92 4.2.2 FET measurement result 94 Chapter 5、Conclusion and Future work 100 Reference 101

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