本文中我們成功設計並製造出高靈敏光矽柱陣列感測器並利用低成本奈米球微影技術與光輔助電化學離子蝕刻，在本文中的實驗可以證明微小生物分子可以利用極化變化被判別，我們利用生物分子微小的折射率變化引發感測器的強烈極化靈敏度在結合極化鍵控系統來觀察邦加球上極化的改變並判別生物分子，這是個非常有前瞻性的初步實驗，我們相信這個前瞻性的矽柱陣列感測器搭配極化鍵控系統技術應用在生物科技領域上，定可替人類帶來革命性的醫療突破。

In this thesis, we successfully designed and fabricated optical high sensitive sensor using silicon nanopillars array by low-cost self-assembly nanosphere lithography method to generate high aspect ratio silicon nanopillars by reactive ion etching and photo-assisted electrochemical etching. In the demonstration of the experimentation, small bio-molecules can be judged by monitoring the polarization variation. We distinguish the bio-molecules from the slight different changes of refractive index, which caused sensor strongly polarization variation, and observe signal constellation by Poincaré sphere based on Polarization Shift Keying (PolSK) fiber-optic system, which makes the sensors extremely sensitive to the refractive index slightly changed resulting from the infiltration of bio-molecules. This is a very promising value from this preliminary experiment. We believe this novel sensor using Si nanopillars array based on PolSK fiber-optic system technology can bring revolutionary medical treatment to the mankind.

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