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研究生: 吳文凱
Wu, Wen-Kai
論文名稱: 微共振腔鈣鈦礦量子點異質接面光偵測器元件之特性探討
Microcavity perovskites quantum dots heterojunction photodetector
指導教授: 李亞儒
Lee, Ya-Ju
李敏鴻
Lee, Min-Hung
口試委員: 李亞儒
Lee, Ya-Ju
李敏鴻
Lee, Min-Hung
徐旭政
Hsu, Cheng-Hsu
楊斯博
Yang, Zu-Po
口試日期: 2023/07/31
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 52
中文關鍵詞: 化學氣象沉積法熱注入法鈣鈦礦量子點布拉格反射鏡塔米電漿光偵測器
英文關鍵詞: Chemical vapor deposition method, Thermal injection method, Perovskite quantum dots, Distributed bragg reflector, Tamm plasma, Photodector
研究方法: 實驗設計法
DOI URL: http://doi.org/10.6345/NTNU202301626
論文種類: 學術論文
相關次數: 點閱:80下載:23
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  • 本篇最初使用化學氣象沉積法製作鈣鈦礦層,將鈣鈦礦作為增益介質,結合一個P型材料氧化鎳和一個N型材料氧化鋅製作成光偵測器,並加入金屬電極銀和布拉格反射鏡形成塔米電漿結構。由於本實驗利用化學氣象沉積法製作的鈣鈦礦層無法達成COMSOL模擬所需的厚度,因此改由熱注入法來製作,將鈣鈦礦層變成量子點的型態。
    熱注入法製作出的鈣鈦礦量子點彼此間有許多的不連續的邊界,因此我們利用PMMA溶液覆蓋於鈣鈦礦層上方,不但填補了鈣鈦礦量子點裡晶粒間的空缺,也可以避免上方的氧化鋅與下方的氧化鎳接觸。量測方面利用COMSOL模擬了解該結構的低反射模態位置,並使用470 nm的LED作為光訊號來源使鈣鈦礦層產生光電流,最後比較有無布拉格反射鏡對鈣鈦礦光偵測器的影響。

    In this experiment, the perovskite layer are used as the gain medium that make by the chemical vapor deposition method at first, and then combine with the P-type material NiO and the N-type material ZnO are made into the photodetector. The photodetector adds metal electrode and distributed bragg reflector to form the Tamm plasma structure. The perovskite layer is made by chemical vapor deposition can’t achieve the thickness required by COMSOL simulations, so we transform the perovskite layer into the form of two-dimensional quantum dots are made by thermal injection method.
    The perovskite quantum dots have pretty much grain boundary between each other, so we use the PMMA solution that cover on the top of them. Not only fill the hole between the perovskite quantum dots, but avoid the NiO layer which under the perovskite and the ZnO layer which on the perovskite are contact. In the measurement, we use the COMSOL simulation to know where low- reflection mode in that structure, and use 470 nm LED as optical signal to let perovskite product the photocurrent. Finally, compare the effect of the perovskite photodector structure with and without the DBR.

    致謝 i 摘要 ii Abstract iii 目錄 iv 圖目錄 vii 第一章 緒論 1 1.1 前言 1 1.2 研究動機與目的 2 1.3 論問架構 3 第二章 基本原理與文獻回顧 4 2.1 鈣鈦礦(Perovskite) 4 2.2 分散式布拉格反射器(Distributed Bragg Reflector) 7 2.3 光學塔米結構 10 2.4 光偵測器(Photodetector) 14 2.5 異質接面(Heterojunction) 18 2.6 文獻回顧 20 第三章 實驗設備與方法 22 3.1 實驗設備 22 3.1.1 烘箱(Oven) 22 3.1.2 電子天秤(Electronic scale) 22 3.1.3 溫控加熱包 23 3.1.4 加熱攪拌器(Hot plate) 23 3.1.5 旋轉離心機(Centrifuge) 24 3.1.6 試管震盪器(Vortex mixer) 24 3.1.7 旋轉塗佈機(Spin coater) 25 3.1.8 超音波震盪機 25 3.1.9 光學顯微鏡(Optical microscope) 26 3.1.10 多功能電源電表 26 3.1.11 示波器(oscilloscope) 27 3.1.12 訊號產生器(Function generator) 27 3.1.13 高溫爐管系統 28 3.1.14 射頻磁控濺鍍機(Sputter) 29 3.1.15 電子束蒸鍍機(E-gun) 30 3.1.16 掃描式電子顯微鏡(SEM) 31 3.1.17 穿透反射系統 32 3.2 實驗藥品 33 3.3 實驗步驟 34 3.3.1 基板清潔 34 3.3.2 化學氣象沉積法鈣鈦礦合成 34 3.3.3 熱注入鈣鈦礦合成 34 3.3.4 PMMA溶液合成 36 3.3.5 元件製作 37 第四章 結果與討論 38 4.1 COMSOL數據模擬與分析 38 4.2 材料特性分析39 4.2.2 化學氣象沉積鈣鈦礦 39 4.2.2 熱注入鈣鈦礦 43 4.2.3 NiO和ZnO分析 44 4.3 鈣鈦礦光偵測器測量與數據分析 45 4.3.1 光偵測器機制與量測45 4.3.2 無DBR的光偵測器性能 46 4.3.3 有DBR的光偵測器性能 47 第五章 結論與未來展望 49 參考文獻 50

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