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研究生: 譚光芯
Tan, Kuang-Hsin
論文名稱: 雙激發線圈巨磁阻感測器於非破壞性檢測之開發與特性研究
Development of double-coil excitation with in-plane GMR sensors for non-destructive testing
指導教授: 廖書賢
Liao, Shu-Hsien
口試委員: 廖書賢
Liao, Shu-Hsien
王立民
Wang, Li-Min
謝振傑
Chieh, Jen-Jie
口試日期: 2024/06/27
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 60
中文關鍵詞: 非破壞性檢測(NDT)渦電流巨磁阻(GMR)感測器探針缺陷檢測
英文關鍵詞: non-destructive testing(NDT), eddy current, giant magnetoresistance(GMR) sensor, probe, defect detection
研究方法: 實驗設計法
DOI URL: http://doi.org/10.6345/NTNU202401465
論文種類: 學術論文
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  • 非破壞性檢測是現代工業技術中重要的領域,應用上包含交通運輸工具、石化工業管線、土木營建物等等。而渦電流檢測是其中一種非破壞性檢測,基於電磁感應的原理來運作,廣泛應用於多種工業領域中的金屬缺陷和裂紋檢測,本研究以金屬鋁板加工作為缺陷,運用針對導電材料的渦電流檢測法作非破壞性檢測。
    渦電流檢測法歷經數十年的研究,許多研究團隊開發出不同優勢的探頭,本研究的探頭是由巨磁阻感測器、偏壓線圈和兩組激發線圈組成。共設計了兩種探頭皆是使用巨磁阻感測器作為接收元件,搭配偏壓線圈來極化巨磁阻感測器。兩組激發線圈的設計上皆是採用反向纏繞的雙線圈並將線圈垂直交疊組合,以達到能夠同時量測不同方向的缺陷。
    實驗部分將加工鋁板模擬出不同缺陷並進行檢測,檢測表面缺陷時,提供越高的激發頻率越能夠清晰地量測出表面缺陷,並且信躁比和圖像的分辨率會隨著探頭拉遠鋁板而降低,檢測深埋缺陷時則是透過降低線圈的激發頻率去提升渦電流穿透深度達到能夠量測深埋在無損金屬下的缺陷。
    從量測結果來看第一種探頭只有最接近待測物的線圈提供訊號,因此製作了第二種改良探頭,將兩組激發線圈以交錯穿插的方式組合在一起,使兩組線圈和待測物的距離近乎相等。第二種探頭能夠量測出不同方向缺陷的存在和位置,能夠響應出寬度0.5 mm表面深度0.5 mm的表面淺裂紋,能夠量測出尺寸在寬1 mm長5 mm的表面短缺陷和埋藏在無損表面下深度1.5 mm的深埋缺陷。

    Non-destructive testing (NDT) is an important field in modern industrial technology, and its applications include transportation vehicles, petrochemical industry pipelines, civil structures, etc. It is widely used in metal surface crack defect in various industrial fields. In this study, metal aluminum plate processing was used as a defect, and the eddy current detection method for conductive materials was used for NDT.
    The probe in this study is composed of a giant magnetoresistive sensor (GMR) , a bias coil and two sets of excitation coils. A total of two probes were designed, both of which use GMR sensors as receiving elements and are equipped with bias coils to polarize the GMR. The two sets of excitation coils are designed to use reversely wound double coils and vertically overlap the coils to measure defects in different directions at the same time.
    The first type of probe is to vertically overlap two sets of coils with different directions one above the other, but this will cause only the coil closest to the object to be measured to provide signals.Therefore, a second improved probe was produced, which combined two sets of excitation coils in a staggered manner so that the distance between the coils and the object to be mesure is nearly equal.
    In the experimental part, different defects will be simulated and detected by processing aluminum plates.When detecting surface defects, the higher the excitation frequency, the more clearly the surface defects can be measured.And the signal-to-noise ratio will decrease as the probe moves away from the aluminum plate.
    Especially for the penetration depth experiment of the improved probe, the surface of the aluminum plate is processed with defects of different depths and widths to measure surface cracks and deeply buried cracks of different depths. This can increase the eddy current of the probe when the excitation frequency is low. Indicating that the improved probe can detect deeply buried defects that cannot be seen with the naked eye.

    第一章 緒論 1 1.1 非破壞性檢測(NDT)技術概論 1 1.2 渦電流檢測系統 6 1.3 巨磁阻(GMR)電流感測器探頭比較 10 1.4研究動機與目的 15 第二章 實驗原理 16 2.1 電磁阻效應(Magnetoresistance) 16 2.2 電磁感應原理 16 2.3 冷次定律(Lenz's law) 17 2.4 渦電流(Eddy current) 17 2.5 集膚效應(Skin effect) 18 第三章 實驗架構與實驗方法 21 3.1 實驗系統架設 21 3.1.1 GMR元件基本特性量測 23 3.1.2 GMR探頭設計(1)(2) 26 3.2 缺陷樣品設計 26 3.3 實驗流程 28 第四章 結果與討論 30 4.1 GMR探頭(1)特性與缺陷量測 30 4.1.1 激發線圈偏壓影響 31 4.1.2 背景值掃描及信噪比(SNR)計算 33 4.1.3 不同頻率缺陷量測結果 33 4.1.4 拉遠探頭缺陷量測結果 37 4.1.5 問題與改進 38 4.2 GMR探頭(2)特性與缺陷量測 39 4.2.1 激發線圈偏壓影響 40 4.2.2 背景值掃描及信噪比(SNR)計算 42 4.2.3 不同頻率缺陷量測結果 44 4.2.4 不同角度缺陷方向量測結果 47 4.2.5 拉遠探頭缺陷量測結果 50 4.2.6 不同深度缺陷量測結果 51 4.2.7 不同長度缺陷量測結果 53 4.2.8 深埋缺陷量測結果 55 第五章 結論 57 5.1 結論 57 5.2 未來展望 57 參考文獻 58

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