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研究生: 郭昭克
Kuo,Chao-Ke
論文名稱: 矽量子點太陽能電池
Silicon Quantum Dots Solar Cell
指導教授: 胡淑芬
Hu, Shu-Fen
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 102
中文關鍵詞: 太陽能矽量子點低壓化學氣相沉積
英文關鍵詞: solar cell, silicon quantum dot, lpcvd
論文種類: 學術論文
相關次數: 點閱:148下載:0
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  • 本實驗利用低壓化學氣相沉積系統LPCVD (low pressure chemical vapor deposition)長成矽量子點,藉由調控NH3和Si2H2Cl2氣體流量與沉積時間,將量子點嵌入於氮化矽中(Si3N4)形成三明治結構。並探討是否需經由再退火(post-anneal)而形成量子點。此外,也藉由控制薄膜之厚度調變量子點大小,以及調變薄膜層積數量以達到所需之量子點層數,其大小及層數皆會應用在分析與太陽能元件上。之後利用原子力顯微鏡AFM(atomic force microscopy)掃描樣本表面,比較有無量子點之表面粗糙度差別。利用高解析穿透式電子顯微鏡HRTEM(high resolution transmission electron microscopy)觀測是否有量子點結晶現象,同時估算出量子點大小及其分佈密度。利用GIXRD (grazing incidence X-Ray diffraction)分析薄膜中是否有結晶現象,並利用Scherrer formula計算出量子點平均晶徑變化。最後利用光激螢光(photoluminescence)觀測量子點發放螢光現象,並進而推算出量子點大小及能階分裂狀態。
    最後將矽量子點應用至太陽能電池中,並量測其效率(efficiency)與外部量子效應EQE(external quantum efficiency),並討論為何量子點太陽能電池效率未能提升。(量子點太陽能電池效率0.7%,無量子點則為6.9%)。

    總目錄 總目錄 I 圖目錄 IV 表目錄 X 第一章 緒論 1 1-1 研究動機 1 1-2 太陽能電池之現況 3 1-2-1 太陽能種類 3 1-2-2 矽太陽能電池效率極限 5 1-2-3第三代太陽能電池 6 1-3 研究目的 7 第二章 基本理論 9 2-1 太陽能電池光電理論 9 2-1-1. 短路電流 12 2-1-2. 開路電壓 13 2-1-3 填充因子(Fill factor) 13 2-1-4. 能量轉換效率(Power conversion efficiency) 14 2-1-5 量子效率(Quantum efficiency) 15 2-2 量子點之基本特性 15 2-2-1 量子點尺寸 15 2-2-2 量子點之應用 17 2-2-2 矽量子點之製備方法 18 2-2-3 量子點之特性 20 2-3 薄膜沉積原理 25 第三章 實驗流程與研究方法 28 3-1. 矽量子點製作流程 29 3-2. 材料分析儀器介紹 33 3-2. 太陽能電池製作流程 41 第四章 實驗結果與討論 48 4-1. 矽量子點長成 48 4-2. 矽量子點之材料分析 56 4-2-1. Transmission Electron Microscopy;TEM 56 4-2-2. Atomic Force Microscopy;AFM 66 4-2-3. Grazing Incidence X-Ray Diffraction;GIXRD 70 4-2-4. Photoluminescence;PL 72 4-3-1. Solar Cell Power Conversion Efficiency 75 4-3-2. External Quantum Efficiency(IPCE) 85 第五章 結論 86 參考文獻 88

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