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研究生： 鍾佾哲
Chung, Yi-Che
論文名稱： 具等能量密度之精微線切割放電加工電源於工件輪廓精度改善研究
A micro w-EDM power source with equal energy density for the improvement of workpiece contour accuracy
指導教授： 陳順同
Chen, Shun-Tong
口試委員： 趙崇禮
Chao, Chung-Li
蔡俊毅
Tsai, Jyun-Yi
張天立
Chang, Tien-Li
鄭淳護
Cheng, Chun-Hu
陳順同
Chen, Shun-Tong
口試日期： 2022/07/28
學位類別： 碩士
Master
系所名稱： 機電工程學系
Department of Mechatronic Engineering
論文出版年： 2022
畢業學年度： 110
語文別： 中文
論文頁數： 168
中文關鍵詞： 等能量密度 、位置同步輸出 、擺線齒輪 、高頻等脈衝微放電
英文關鍵詞： equal energy density, position synchronized output(PSO), cycloidal gear, high-frequency ISO-pulsed micro-discharge
研究方法: 實驗設計法
DOI URL： http://doi.org/10.6345/NTNU202201364
論文種類： 學術論文
相關次數： 點閱：118  下載：1 
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    • 本研究旨在開發一應用於精微線切割放電加工具「等能量密度」的放電電源，以改善工件轉角處因能量密度過度集中所導致的加工誤差問題。放電能量的過度集中，可能會造成輪廓過切或讓切情形，尺寸精度易發生誤差且輪廓精度失真，造成精微元件缺損。為維持精微工件的輪廓精度，本研究提出一種「位置同步輸出(Position Synchronized Output, PSO)」的技術，CNC控制系統所產生的連續位置訊號，經由元件可程式邏輯閘陣列(Field Programmable Gate Array, FPGA)轉換，以便控制高頻等脈衝微放電的正確輸出距離，達到等能量密度的精微線切割放電加工。實驗以超微粒碳化鎢為材料進行轉角精度加工，結果顯示，在放電電容2000 pF、放電頻率800 kHz、加工進給率0.04 mm/min的加工條件下，當位置同步輸出機能啟動時，以0.03 μm的開啟距離有最顯著的改善效果，其在內、外轉角處的加工誤差分別可從10.22 μm及6.26 μm降至2.77 μm及0.92 μm。本研究以擺線齒形微結構進行加工驗證，擺線齒形微結構之齒厚與齒間的加工誤差皆小於1 μm，證實位置同步輸出機能輔助加工能獲得穩定且高一致的放電能量密度。顯見本研究所開發的「具等能量密度之放電電源」可使放電能量密度隨加工路徑的距離進行均勻化分佈，減少工件材料轉角處被過度熔蝕的現象，維持工件輪廓的完整性及尺寸的精確性。這項研究成果能改善精微元件的形狀精度，值得商業化。

    The purpose of this study is to develop a discharge power source with "equal energy density" applied to the micro w-EDM, so as to improve the machining error caused by the excessive concentration of energy density at the corners of the workpiece. Excessive concentration of discharge energy is likely to cause the workpiece contour either over-cut or under-cut situations, the dimensional accuracy is prone to error and incorrect contouring accuracy resulting in defects of microparts. In order to maintain the contour accuracy of micropart, a "Position Synchronized Output (PSO)" technology, in which the continuous position signal generated by the CNC system is converted by the Field Programmable Gate Array (FPGA) is proposed in this study to control the correct discharge distance of the high-frequency ISO-pulsed micro-discharge, achieving the micro wire-cut discharge technology with the same energy density. The experiment uses ultra-fine tungsten carbide as the material for corner precision machining test. The result show that the most significant improvement effect can be achieved when the PSO function with the distance of 0.03 μm is enabled and under the machining conditions of discharge capacitance of 2,000 pF, discharge frequency of 800 kHz, and machining feed-rate of 0.04 mm/min. The machining errors at the inner and outer corners can be reduced from 10.22 μm and 6.26 μm to 2.77 μm and 0.92 μm, respectively. The cycloid gear microstructure is used for machining verification. Experimental results show that the machining errors of tooth thickness and tooth pitch of the cycloid gear microstructure is all less than 1 μm, and it is proved that the PSO function assisted the machining to obtain stable and high-consistent discharge energy density. It is evident that the discharge power source with "equal energy density" developed in this study can evenly distribute the discharge energy density with the distance of the machining path, reducing the phenomenon of over-cut and under-cut at the corners of the workpiece, which maintains the integrity of the workpiece contour and dimensional accuracy. The research result is worthy of commercialization due to the improvement of form accuracy of micropart.

    目錄 中文摘要 i Abstract ii 誌謝 iv 目錄 v 表目錄 ix 圖目錄 xi 符號說明 xx 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 5 1.2.1 轉角精度控制 6 1.2.2 精微放電電源 12 1.3 研究動機 19 1.4 研究目的 20 1.5 研究方法 21 第二章 實驗原理 23 2.1 精微放電加工原理 23 2.2精微線切割放電加工原理 24 2.3 位置同步輸出原理 25 2.3.1 定距離觸發模式 26 2.3.2 陣列觸發模式 27 2.3.3 窗口觸發模式 27 2.4 等能量密度放電原理 28 第三章 實驗設備與材料 30 3.1 硬體設備 30 3.1.1 高剛性桌上型龍門四軸精微CNC工具機 30 3.1.2 精微線切割放電加工機構 32 3.1.3 元件可程式邏輯閘陣列(FPGA) 33 3.1.4 微型直流馬達 35 3.2 量測設備 36 3.2.1 掃描式電子顯微鏡 36 3.2.2 光學顯微鏡 36 3.2.3 混合訊號示波器 37 3.2.4 3D雷射掃描式共軛焦顯微鏡 38 3.3 實驗材料 38 3.3.1 微細銅線(電極材料) 38 3.3.2 碳化鎢(工件材料) 39 第四章 等能量密度之放電波形設計 40 4.1 高頻等脈衝微放電電源 41 4.2 位置同步輸出參數控制介面設計 42 4.3 位置同步輸出測試與分析 45 4.4 等能量密度之放電波列實現 52 第五章 等能量密度放電加工實驗 55 5.1 不同放電電容之單軸向PSO機能 56 5.1.1 切割精度比較 56 5.1.2 切割效能比較 59 5.2 不同放電電容之雙軸向PSO機能 63 5.2.1 銳角之切割精度比較 63 5.2.2 銳角之切割效能比較 72 5.2.3 直角之切割精度比較 80 5.2.4 直角之切割效能比較 89 5.2.5 鈍角之切割精度比較 96 5.2.6 鈍角之切割效能比較 105 5.3 不同進給率之雙軸向PSO機能 112 5.3.1 切割精度比較 113 5.3.2 切割效能比較 120 5.4 不同定距離之雙軸向PSO機能 126 5.4.1 切割精度比較 126 5.4.2 切割效能比較 132 5.5 放電能量密度比較 135 5.5.1 放電加工能量定義 135 5.5.2 不同放電電容之放電能量比較 138 5.5.3 不同進給率之放電能量比較 141 5.5.4 不同定距離之放電能量比較 144 第六章 等能量密度加工驗證 147 6.1 擺線齒形 147 6.2 擺線齒形設計 148 6.3 擺線齒形微結構加工 149 6.4 擺線齒形比較與探討 150 第七章 結論與未來展望 157 7.1 結論 157 7.2 研究成果 158 7.3 研究貢獻 158 7.4 未來展望 159 參考文獻 160

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