本研究旨在開發、設計及製造一部「複合式精微工具機」，並應用此部微型工具機進行微製造技術的開發、研究與驗證。此精微工具機結合「機、電、光」製造技術於系統上，主要用於微型模具、微型刀具、微型零件、微型結構與微型量具的開發製造與應用。為達複合製造目的，文中提出「線上微製造」的技術，透由改變工作槽與製程調整，使工件安置後，至加工完成前都不需拆卸，所以工件沒有定位誤差問題。在精微工具機開發的過程，本研究將微型放電加工、微型線切割放電加工、同心微孔放電與微量測等技術加入系統設計，並融入微型高速銑削與微型研削等精密技術，以單一製程技術及複合製程技術呈現。單一技術包括高速微型銑削，用於微型陣列非球面模具的製造；微型放電銑削以直徑20 µm的微細電極，於直徑1 mm鎢鋼球上，進行曲面字型的創成加工，呈現本研究對複雜3D微模穴的製造能力；微線切割放電加工，本研究以線徑13 µm的微細鎢線，切割微型感測元件與台北101的微縮建物；複合製程技術結合「同心放電鑽孔」與「微鑽研技術」，於工具機上成型一微細鑽研刀具，並成功應用於石英玻璃的鑽研加工。在微量測技術方面，以臨界接觸量測與光學量測比較方式，建構線上微量測與補償再加工的技術，量測精度可達本研究所開發的複合式精微工具機之定位精度。

The main purpose of the thesis is to develop a hybrid precision-miniature machine tool which combines mechanical, electric with optical manners to use in the fabrication of micro parts, tools and moulds. An on-machine micro fabrication technique, by which a designed exchangeable working table is employed, is proposed to precisely machine the workpiece. Two species of processes, single and hybrid fabrication techniques are created on the developed machine tool. The single process comprising the micro high-speed milling, micro EDM, micro w-EDM, and micro measurement, while the hybrid processes include the co-centric micro-hole drilling-grinding and micro EDMilling techniques. Some machining examples, such as the multi-level aspheric micro lens mould array machining by micro end milling cutter, micro comb electrode cutting and microform of Taipei-101 making using ψ13 µm tungsten wire, as well as micro hole drill-grinding on optical glass by micro diamond tool are successfully fabricated and verified. Two measurement-assisted approaches, automatic optical inspection (AOI) and critical contact measurement (CCM) are also developed and used in accurate compensating and re-machining via micro EDM. By applying the on-machine measurement-assisted, the measuring accuracy is experimented and arrived within the positional accuracy of the developed hybrid machine tool. A micro 3-D engraving mould on a small steel ball of 1-mm diameter and a micro probe with 30 µm in diameter are perfectly fabricated, respectively. The micro tool or part does not be reloaded and readjusted until all planned tasks are completed once the workpiece is mounted on the machine table, therefore the machining accuracy is improved and the machining performance is raised also. Experimental results confirmed that the developed hybrid machine tool can manufacture impeccably and commercialize worthily for contributing to the precision industry.

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