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研究生： 潘眉秀
Mei-Hsiu Pan
論文名稱： 矽上微環形共振腔之研究與應用
Study of Optical Resonant Micro-ring Cavity Based on SOI and Application
指導教授： 曹士林
Tsao, Shyh-Lin
學位類別： 碩士
Master
系所名稱： 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2007
畢業學年度： 95
語文別： 英文
論文頁數： 142
中文關鍵詞： 微環形 、矽上絕緣層 、共振腔 、有限差分時域演算法 、濾波器 、波長開關器
英文關鍵詞： Micro-ring, SOI, Cavity, FDTD, filter, wavelength switch
論文種類： 學術論文
相關次數： 點閱：172  下載：28 
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    • 本文為研究內結合光學波導主動與被動式元件其為未來發展之趨勢。我們將光學波導結合光學微環洐共振腔與空橋的結構並建置在SOI矽晶片上，此研究與模擬利用有效差分時域演算法進行模擬與設計。利用自由载子電漿分散效應以及蕭基二極體結構來調變此元件，藉由電光調變共振腔來製作濾波器與光學交換器應用於通訊上。在感測器應用上，我們模擬應用微環形共振器的光濾波器特性，在環形波導區域，利用生物物質之折射率變化，藉此從波導的輸出端擷取出不同的特定信號，並於此論文中，設計微環形共振腔的幾何結構，並探討其感測功率靈敏度之分析。在微環共振器感測器設計應用上我們著重於小尺寸、低成本以及高靈敏度之提升。

    In this thesis, we integrated development of optical waveguide for the active and the passive device has become the future trend. We propose optical waveguide components for optical micro-ring resonator building on silicon-on-insulator (SOI) wafers, and also integrated air-bridge structure and the simulation is based on the well-known Finite-difference Time Domain (FDTD) technique. We used the free-carrier plasma dispersion effect and Schottky diode structure to modulate our filter and optical switch device; we devote our attraction on the electro-optical micro-ring resonator to apply in optical communication system. In sensing applications, we also design the geometric structure of resonance cavity to see different resonances are discussed in the thesis. We design the micro-ring their have small size, low cost, and potential for high sensitivity make them attractive for bio-sensing applications.

    Chapter 1 Introduction …………………………………………………1 Chapter 2 Design and Simulation of Passive Optical Micro-ring Resonators Filter Based on SOI Waveguide…………………8 2-1 Introduction of the Technique of Silicon-on-Insulator (SOI) Waveguide, and Air-Bridge Micro-cavity Structure……9 2-1-1 Introduction to the Silicon-on-Insulator (SOI) Material characteristics…………………………………………………11 2-1-2 Introduction of Micro-ring Resonator Devices by SOI Substrate Material…………………………………………………………12 2-1-3 Introduction of Micro-ring Resonator Devices by Air-Bridge Structure……………………………………………………………13 2-2 Background Theorem of Beam Propagation Method (BPM), Finite Difference Time Domain (FDTD) Method, Coupling Mode Theorem and Scattering Matrix of Micro-ring Resonator……14 2-2-1 Mathematical Formulation of Beam Propagation Method…5 2-2-2 Mathematical Formulation of Finite Difference Time Domain (FDTD) Method………………………………………………………18 2-2-3 Evanescent Wave………………………………………………………21 2-2-4 Scattering Matrix of Micro-ring Resonator………………23 2-3 Design and Simulation of Optical Micro-ring Resonators Filter by Air-Bridge Based on SOI Waveguide……………………30 2-3-1 Simulation of waveguide size by Micro-ring Resonator Based on SOI……………………………………………………31 2-3-2 Design and Simulation of the Positive Gap Micro-ring Resonator Based on SOI………………………33 2-3-3 Design and Simulation of The Negative Gap Micro-ring Resonator Based on SOI……………………………………………………40 2-3-4 Design and Simulation of The Air-bridge Micro-ring Resonator Based on SOI……………………………………………………46 2-4 Discussion and Summary……….……………………………………52 Chapter 3 Design and Simulation of Electro-Optical Wavelength Switch and Tunable Filter by Zero & Negative Gap Micro-ring Resonator Based on SOI Waveguide……………………74 3-1 Introduction of Active Optical Device Based on SOI Waveguide………………………………………………………………………75 3-1-1 Introduction of Optical Wavelength Switch ……………77 3-2 The Technology of Modulator Active Device for Optical Micro-ring Resonators Structure Based on SOI Waveguide……78 3-2-1 Free-Carrier Plasma Dispersion Effect……………………78 3-2-2 The Schottky Electro-Optical Modulator Based on SOI Waveguide…………………………………………………………………………80 3-3 Design and Simulation Active Device for Optical Micro-ring Resonators Structure Based on SOI Waveguide……………81 3-3-1 Design and Simulation of Electro-Optical Routing Wavelength Switch by Micro-ring Resonator Based on SOI……83 3-3-1-1 Design and Simulation of the Positive Gap Electro-Optical Routing Wavelength Switch by Micro-ring Resonator Based on SOI……………………………………………………………………84 3-3-1-2 Design and Simulation of the Zero-Gap and the Negative Gap Electro-Optical Routing Wavelength Switch by Micro-ring Resonator Based on SOI …………………………………85 3-3-1-3 Design and Simulation of the Air-bridge Electro-Optical Routing Wavelength Switch by Micro-ring Resonator Based on SOI……………………………………………………………………86 3-3-2 Design and Simulation of Tunable Filter by Micro-ring Resonator Based on SOI Waveguide……………………………………87 3-3-2-1 Design and Simulation of the Positive Gap Tunable Filter by Micro-ring Resonator Based on SOI……………………88 3-3-2-2 Design and Simulation of the Zero-Gap and the Negative Gap Tunable Filter by Micro-ring Resonator Based on SOI ……………………………………………………………………………89 3-3-2-3 Design and Simulation of the Air-bridge Tunable Filter by Micro-ring Resonator Based on SOI……………………90 3-4 Discussion and Summary………………………………………………91 Chapter 4 Design and Simulation Air-bridge Micro-ring Sensor Based on SOI Waveguide…………………………………………107 4-1 Introduction of Sensor……………………………………………107 4-1-1 Homogeneous Sensing………………………………………………111 4-1-2 Surface Sensing……………………………………………………112 4-2 T Working principle of Micro-ring Sensor…………………112 4-3 Design and Simulation of Optical Micro-ring Sensor Based on SOI Waveguide……………………………………………………114 4-3-1 Design and Simulation of the Zero-Gap Optical Micro-ring Sensor Based on SOI………………………………………………116 4-3-2 Design and Simulation of the Air-Bridge Optical Micro-ring Sensor Based on SOI………………………………………………117 4-4 Discussion and Summary……………………………………………118 Chapter 5 Conclusions……………………………………………………127

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