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研究生: 包鈺楷
論文名稱: 利用雙光軸共焦顯微術同時量測透明物質之折射係數與厚度
指導教授: 郭文娟
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 44
中文關鍵詞: 高斯光學共焦顯微術
論文種類: 學術論文
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  • 於本文中,我們以高斯光學之理論為基礎,推導出能同時量測透明物質之折射率與厚度之公式,並以之與幾何光學之理論模型進行比較。同時,透過諾瑪斯基分光稜鏡(Nomarski prism)之使用,我們發展出一套雙軸共焦顯微技術,並以此當作光學實驗之基礎架構。於樣品折射率與厚度之量測實驗中,我們透過掃描包含顯微鏡蓋玻片、鍍光阻之矽基板、微透鏡陣列等之多種樣品成功測試了該理論與架構之正確性與精準度。

    In this thesis Gaussian beam optical theory is applied to put forward a more accurate equation by which refractive index and thickness of transparent material can be simultaneously calculated within single scan of a novel dual-beam confocal microscope. Specimens of commercial microscope cover glasses, silicon substrate coated with photoresist, and microlens array are being scanned to investigate the accuracy of the proposed method and optical setup. Our experimental results show consistency with results yielded from other reliable imaging methods. We have presented and demonstrated a simple and accurate method for simultaneous measurement of refractive index and thickness of optically transparent media. This technique has potential for bio-imaging and other noncontact imaging applications.

    Chapter 1 Introduction...1 Chapter 2 Theory...4 2.1 Confocal microscopy...4 2.2 Geometrical optics...6 2.2.1 Introduction to geometrical optics...6 2.2.2 Equation derived from geometrical optics model...7 2.3 Gaussian beam optics...8 2.3.1 Introduction to Gaussian beam optics...8 2.3.2 Ray transfer matrices for Gaussian beams (ABCD law)...11 2.3.3 Equation derived from Gaussian beams model...12 Chapter 3 Material and Method...14 3.1 Single-beam confocal microscopy...14 3.2 Specimen measurement in single-beam confocal microscopy...15 3.3 Dual-beam confocal microscopy...19 3.4 Specimen measurement in dual-beam confocal microscopy...23 Chapter 4 Results and Discussion...25 4.1 Experimental results of single-beam system...25 4.2 Experimental results of dual-beam system...31 4.2.1 Experimental results of cover glasses...31 4.2.2 Experimental results of silicon substrate coated with photoresist...33 4.2.3 Experimental results of microlens array...35 Chapter 5 Conclusion...40 References...40

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