本研究旨在以低成本方式，開發、設計及製造一部「高剛性微型工具機」，並應用此部高剛性工具機，進行高精度陣列光學微模具的開發。此微型工具機整合「機、電、光」製造技術於機器系統上，主要係為開發非球面及繞射光柵陣列模具而設計。為達高剛性與高穩定性目的，本研究設計兩種常用的工具機結構，包括C型(又稱開放式結構)與龍門式結構(又稱封閉式結構)。透由分析軟體，分別對此兩結構進行受力承載分析與設計變更，以實現高剛性工具機之設計，期能建構適用於光學微模具開發的精密工具機。過程中，也分別對此兩不同結構的工具機進行靜態與動態之振動量測，以便決定工具機之設計型態，達到高精密、高剛性微型工具機開發及光學微模具加工目的。接續再以此開發的工具機，對「非球面光學陣列微模具」及「奈米V溝光柵陣列模具」進行製作驗證。為製作非球面陣列微模具，本研究先行發展「非球面曲線產生器」，並提出「非球面精密蠟模量測」方法，以便進行非球面模具之製造，期能以低成本開發具技術自主之非球面製造技術。在陣列光柵方面，本研究亦對陣列V溝發展「CNC程式產生器」，並開發飛刀加工技術，單晶鑽石刀具以高速旋轉法快速移除材料，故V溝陣列模具可獲得高形狀精度、高尺寸精度與高表面粗糙度。由實驗證實，本研究已成功開發出高精密、高剛性微型工具機，並能技術自主的完成非球面光學陣列微模具與奈米V溝光柵陣列微模具。

This study presents a novel, economical and efficient fabrication technique for precisely generating optical micro mould array on the developed tabletop machine tool. The machine combines relative mechanical, electrical with optical technologies to fabricate diffractive optical micro moulds. To obtain high system-stiffness of machine tool, two structures including C-shaped and gantry frameworks are designed and compared. Via the mechanical design, interference simulation, deformation analysis on the structure, and measurement of dynamic and static vibrations, a stable high-stiffness tabletop machine tool can be achieved successfully. To machine micro aspheric mould array, two techniques involving the aspheric curve generator and aspheric wax mould measurement method is developed and proposed in the study. Fly cutting which applies a single crystalline diamond tool and simple balancing principle of grinding wheel, the micro V-groove array can be successfully implemented on the workpiece made of Ni-P plate on the developed machine. Experimental results demonstrate satisfactory geometric accuracy, dimensional accuracy and surface roughness can be realized, respectively. It is concluded that the proposed method has the potential of producing nano-scale optical moulds by using the developed machine tool.

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