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研究生: 江宗翰
Zong-Han, Jiang
論文名稱: 智能化精微工具機開發與光學玻璃微結構加工研究
Development of an intellectualized machine tool and research of microstructure machining on optical glass
指導教授: 陳順同
Chen, Shun-Tong
學位類別: 碩士
Master
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 91
中文關鍵詞: 智能化工具機光學玻璃微加工進給速度回饋
英文關鍵詞: intellectualized machine tool, optical glass, micro machining, feed-rate feedback mechanism
論文種類: 學術論文
相關次數: 點閱:291下載:14
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  • 光學玻璃因為其優良的物理、電子及光學性質因而受到廣泛的應用,如智慧型手機、相機等各種消費型3C產品。光學玻璃雖有上述優秀的特性,不過當進行切削或移除時,往往會產生無法預測的脆性破壞,這是長期困擾著產業界的難題,也是光學玻璃無法更加普及使用的原因。本研究旨在開發一部「智能化精微工具機」,主要目的是針對光學玻璃(BK7)、金剛玻璃(Gorilla glass)及石英(Quartz)等硬脆材料,進行精微切削技術的開發。為避免硬脆材料加工時產生脆裂破壞及微細裂紋,本研究提出一原創概念—在工具機上設計切削阻抗感測裝置,感測切削受力大小,並依受力迅速回授調整切削進給速度,使工具機具類人化回饋機制,以達「智能化(Intellectualization)」設計目的,提升加工品質。透由實驗測試,本研究所提方法,證實能有效保護光學玻璃免於脆性崩裂,並使切削表面粗糙度由Ra 0.099 µm降至Ra 0.056 µm。因為回饋機制的保護,本研究除了在強度極高之金剛玻璃上成形一深度0.7 mm的條狀溝槽,亦成功在石英玻璃上成形一高度0.3 mm的微型金字塔。相較於設備成本高昂的超音波工具機,本研究開發之工具機具容易控制且低成本的優點,深具市場競爭力。

    Optical glass is widely applied in smart-phones, digital cameras and other consumer-oriented electronic products because of the excellent physical, electronic and optical properties. However, it is difficult in material removal resulting from an unpredictable brittle fracture. Brittle fracture such optical glass cannot thus be employed extensively. The primary purpose of the thesis is to develop an intellectualized machine tool and using the finished machine tool to fabricate microstructure on optical glass as BK7, gorilla glass and quartz. To avoid brittle fracture damage and micro cracks, a sensor (feedback) mechanism made with a three-axis load-cell constantly detects the drilling force is proposed to give real-time feedback to regulate the feed-rate. Grinding-drilling is applied whereby the diamond tool slowly mills into the glass grinding layer by layer. By applying the human-like feedback mechanism, the machine tool can achieve an intellectualized machining and improve the processing quality. Experimental results demonstrate that the designed feedback mechanism can provide an effective protection against abrupt cutting force. The roughness of grinding surface can be accomplished from Ra 0.099 µm down to Ra 0.056 µm. A precision bar-shaped groove with 0.7 mm in depth and a micro tower with 0.3 mm in height can be finished on a toughened gorilla glass and quartz, respectively. Compared to commercial machine tool with ultrasonic vibration-assisted, this development is simple and cost-effective.

    中文摘要 i Abstract ii 誌謝 iii 目錄 iv 表目錄 vii 圖目錄 ix 符號說明 xiii 第一章 緒論 1 1.1前言 1 1.2 研究動機 3 1.3 研究目的 4 1.4 研究方法 5 1.5 文獻回顧 6 1.5.1 脆性材料加工 6 1.5.2 含硼聚晶鑽石刀具應用 10 1.5.2應用於工具機之切削力感測 12 第二章 實驗原理 15 2.1光學玻璃之延性加工原理 15 2.2放電加工原理 16 2.2.1線切割放電加工原理 17 2.3 含硼聚晶鑽石導電原理 18 2.4荷重元測力原理 19 2.4.1 應變規 20 2.4.2 荷重元壓力量測方法 20 第三章 實驗設備與設計 22 3.1 CNC綜合切削加工機 22 3.2荷重元三軸測力裝置 23 3.3 線切割放電加工機 24 3.4高速主軸與導電迴路設計 25 3.5實驗材料 26 3.5.1含硼聚晶鑽石刀具 26 3.5.3光學玻璃(BK7、Gorilla glass) 28 3.6量測儀器設備 30 3.6.1工具光學顯微鏡 30 3.6.2掃描式電子顯微鏡 30 3.6.3雷射掃描式共軛焦顯微鏡 31 3.6.4分散式拉曼光譜儀 31 第四章 實驗方法 33 4.1智能化精微CNC工具機設計與開發 34 4.1.1臥式精微CNC工具機設計 34 4.1.2臥式精微CNC工具機分析 36 4.1.3三軸測力裝置之即時回饋系統設計 39 4.1.4臥式精微CNC工具機製作、組裝與校正 40 4.1.5 臥式精微CNC工具機實體共振分析 41 4.2含硼聚晶鑽石刀具設計與開發 45 4.2.1 微端銑刀造型設計與分析 46 4.2.2含硼聚晶鑽石刀具開發流程 47 4.2.3 實驗設計與刀具成形 48 (1)線切割加工方向對含硼聚晶鑽石微端銑刀成形的影響 50 (2)含硼聚晶鑽石刀具表面形貌探討 51 4.2.4含硼聚晶鑽石微端銑刀初步銑削測試與探討 53 第五章 實驗驗證 58 5.1 光學玻璃微溝研銑實驗 58 5.1.1切削劑加入模式的影響 59 5.1.2刀具後斜角影響 61 5.1.4銑削速度影響 64 5.1.3銑削深度影響 68 5.2進給回饋判斷機制 71 5.2.1回饋判斷方法 72 5.2.2進給回饋判斷機制驗證 73 5.2.3光學玻璃微結構之驗證 76 (1)條狀溝槽成形 76 (2)微金字塔成形 77 第六章 結論與未來展望 80 6.1結論 80 6.2未來展望 81 參考文獻 83 作者簡歷 91

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