氧化鋅在氣體偵測器應用方面為一種極為普遍使用的材料，因為其在還原性氣氛中會與氧化物表面吸附的氧氣反應造成電阻的改變。並可偵測或辨別多種有毒氣體及可燃燒性的氣體，如一氧化碳、乙醇、丙烷等等。本研究首先利用高真空壓鑄方式將亞共晶、共晶與過共晶相熔融的鋅鋁合金金屬溶液鑄入陽極氧化鋁(Anodic Aluminum Oxide, AAO)奈米模板中，待金屬液冷卻固化後，可得到陣列式鋅鋁合金奈米線，經熱處理後可得陣列式氧化鋅鋁奈米線，以濕蝕刻方式將AAO奈米模板移除使奈米線裸露，最後於上方蒸鍍銅薄膜完成金屬半導體氣體感測元件製作。而元件之成份、微結構及性質檢測則以能量散佈光譜儀(Energy Dispersive Spectrometer , EDS)、掃瞄式電子顯微鏡(Scanning Electron Microscopy , SEM)、X光繞射分析儀(X-ray Diffractometer , XRD)與示差掃描熱量分析儀(Differential Scanning Calormetry , DSC)做分析。本文之目的在研究以氧化鋅陣列式奈米線感測器元件作為對照組，而添加各比例鋁之氧化鋅陣列式奈米線感測元件作為設計組，將兩組元件置於相同檢測條件中，比較其對氧氣響應之靈敏度。而氣體檢測部分則是自行設計之量測平台，藉由質量流量控制器( Mass Flow Controler, MFC)控制待測氣體濃度，進行微訊號量測與訊號數據擷取，於溫度100℃、150℃、200℃，分別通入5%、10%、15%、20% 體積百分濃度的O2。結果顯示，提高溫度有助於靈敏度的提升；具有奈米線陣列之感測元件靈敏度排列順序ZnO 95%-Al 5%＞ZnO 98%-Al 2%＞ZnO 100%＞ZnO 90%-Al 10%，因此靈敏度會隨鋁的含量增多而提升，但若添加超過5%，其靈敏度會隨鋁的含量增多而下降。

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