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研究生: 黃祺翔
Huang, Chi-Hsiang
論文名稱: 二維材料二硫化鈮表面結構與電性初探
Preliminary study on surface structure and electrical properties of two-dimensional material niobium disulfide
指導教授: 傅祖怡
Fu, Tsu-Yi
口試委員: 陳瑞山
Chen, Ruei-San
張明哲
Chang, Ming-Che
傅祖怡
Fu, Tsu-Yi
口試日期: 2022/07/22
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 60
中文關鍵詞: 掃描穿隧式電子顯微鏡掃描穿隧能譜二硫化鈮機械剝離曝氧實驗
英文關鍵詞: STM, STS, NbS2, mechanical exfoliation, exposed oxygen
研究方法: 實驗設計法現象分析
DOI URL: http://doi.org/10.6345/NTNU202201099
論文種類: 學術論文
相關次數: 點閱:115下載:8
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  • 二硫化鈮是屬於金屬性二維材料中的過度金屬二硫族化物,雖然理論學家已經對於二硫化鈮有許多報導,但在奈米級的表面相關影像卻非常少,可能源自於對二硫化鈮表面掃描時要取得清晰的影像並不容易,需要有相當的掃描經驗與對掃描影像的後續處理才能取得較清晰的二硫化鈮奈米級表面。
    本篇實驗透過掃描穿隧式電子顯微鏡觀察二硫化鈮機械剝離前後與曝氧5到40分鐘的表面缺陷並分析以及使用掃描穿隧能譜功能量測其不同狀態下的電性變化。觀察到隨著曝氧時間增長二硫化鈮表面上的暗點和亮點缺陷有變大的趨勢,至於在費米能階附近的電阻會隨著與氣體接觸而上升,而正負偏壓下會逐漸回到如機械剝離前的狀態。

    Niobium disulfide is a transition metal dichalcogenide (TMDs) in metallic two-dimensional materials. Although theorists have reported many reports on niobium disulfide, there are very few on nanoscale surface images. Since it is not easy to obtain a clear image when scanning the surface of niobium disulfide, considerable scanning experience and subsequent processing of the scanned image are required to obtain a clearer nanoscale surface of niobium disulfide.
    In this experiment, the surface defects on NbS2 before and after mechanical exfoliation and exposure to oxygen for 5 to 40 minutes were analyzed by STM, and analyze the electrical changes in different states by STS function. We observed that the dark spot and light spot defects on the NbS2 surface tend biger with the increase of oxygen exposure time. As for the resistance near the Fermi level, it will increase with the contact with the gas, and the positive and negative bias will return such as the state before mechanical exfoliation.

    致謝 i 摘要 ii Abstract iii 目錄 iv 圖表目錄 vii 第一章 緒論 1 第二章 實驗原理與方法 4 2.1 STM基本原理 4 2.2 STM基本操作 7 2.2.1 定電流模式(constant current mode) 8 2.2.2 定高度模式(constant height mode) 9 第三章 實驗儀器 11 3.1 實驗儀器簡介 11 3.2 超高真空系統 12 3.2.1 油封式機械幫浦 13 3.2.2 渦輪分子幫浦 14 3.2.3 離子幫浦(Iron pump) 15 3.3真空壓力計(Gauge) 16 3.4殘氣分析儀(Residual gas analyzer,RGA) 19 3.5掃描式穿隧電子顯微鏡(Scanning Tunneling Microscope,STM) 20 3.5.1掃描頭(Scanner) 20 3.5.2步進器(stepper) 21 3.5.3避震裝置與掃描平台(Vibration isolation & scan platform) 22 3.5.4電子控制裝置(Electronics Controller) 23 第四章 實驗步驟 24 4.1實驗流程圖 24 4.2 掃描前置作業 25 4.2.1 STM探針製備 25 4.2.2 樣品準備 27 4.2.3 機械剝離表面 27 4.2.4 製備曝氧用氣瓶 28 4.2.5 樣品密閉曝氣 30 4.3超高真空環境建立 30 第五章 實驗數據與討論 33 5.1 二硫化鈮的表面 33 5.1.1大尺度掃描二硫化鈮於不同偏壓下的表面形貌 33 5.1.2小尺度下掃描二硫化鈮於不同偏壓下的表面形貌 34 5.2 機械剝離後二硫化鈮的晶格檢測 37 5.3 小尺度下二硫化鈮曝氧與機械剝離前後的表面形貌分析 39 5.3.1 機械剝離前後的表面 39 5.3.2 機械剝離後曝氧的表面 42 5.4 二硫化鈮曝氧與機械剝離前後的電性分析 47 5.4.1費米能階附近的電性分析 50 5.4.2正、負偏壓下的電性分析 52 第六章 實驗結論 55 參考文獻資料 57

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