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研究生: 陳宥任
Chen, You-Jen
論文名稱: 基於多孔隙半導體材料的二氧化氮氣體感測器之研製
Development of Nitrogen Dioxide Gas Sensors Using Porous Semiconductor Materials
指導教授: 楊承山
Yang, Chan-Shan
口試委員: 楊承山
Yang, Chan-Shan
楊啓榮
Yang, Chii-Rong
黎宇泰
Li, Yu-Tai
口試日期: 2024/07/25
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 108
中文關鍵詞: 氣體感測器太赫茲超材料金屬有機框架材料鈦酸鋅鈣鈦礦氧化鋅
英文關鍵詞: Gas sensor, Terahertz, Metamaterial, Zinc oxide, Metal-organic framework, Zinc titanate, Perovskite
研究方法: 實驗設計法
DOI URL: http://doi.org/10.6345/NTNU202401641
論文種類: 學術論文
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致謝 i 摘要 ii Abstract iv 總目錄 vi 表目錄 x 圖目錄 xi 第一章 緒論 1 1.1 前言 1 1.2 二氧化氮 2 1.3 太赫茲 3 1.4 超材料 4 1.5 有機金屬框架材料 6 1.6 氧化鋅 7 1.7 鈦酸鋅 8 1.8 氣體感測器的種類與原理 9 1.9 指叉電極 11 1.10 雷射誘導石墨烯 12 1.11 研究動機與目的 13 1.12 論文架構 14 第二章 文獻回顧 16 2.1 氣體感測器種類及介紹 16 2.1.1 氣體感測器之參數 20 2.2 太赫茲超材料氣體感測器 22 2.3 二氧化氮氣體感測器 25 2.4 氧化鋅 29 2.5 金屬有機框架材料 30 2.6 鈦酸鋅 33 第三章 實驗設計與規劃 36 3.1 實驗程序規劃 36 3.2 氣敏粉末之製備 38 3.2.1 氧化鋅/釩金屬有機框架(ZnO/V-MOF)粉末之製備 38 3.2.2 鈦酸鋅(ZnTiO3)粉末之製備 42 3.3 太赫茲超材料之設計與製備 44 3.4 指叉電極之設計與製備 47 3.5 二氧化氮氣體感測器之性能測試-太赫茲量測系統 49 3.6 二氧化氮氣體感測器之性能測試-電性量測系統 50 3.7 實驗與檢測設備 51 3.7.1 製程設備 51 3.7.2 檢測設備 52 第四章 結果與討論 57 4.1 太赫茲超材料之設計 57 4.2 ZV400與ZT800之製備 60 4.2.1 ZnO之表面形貌 60 4.2.2 V-MOF之表面形貌 62 4.2.3 微米碳球(Carbon Ball)之表面形貌 64 4.2.4 ZV400之表面形貌 66 4.2.5 ZT800之表面形貌 69 4.2.6 ZnO、V-MOF與ZV400之XRD分析 72 4.2.7 ZT800之XRD分析 75 4.2.8 ZnO、V-MOF與ZV400之XPS分析 76 4.2.9 ZT800之XPS分析 83 4.3 ZV400 整合超材料氣體感測器之性能測試 86 4.3.1 太赫茲超材料的氣體測試比較 86 4.3.2 超材料整合ZV400的響應比較 87 4.3.3 超材料整合ZV400於不同二氧化氮濃度之模擬 88 4.4 ZV400 與ZT800整合石墨烯電極氣體感測器之性能測試 89 4.4.1 ZV400 整合石墨烯電極之氣體感測器 91 4.4.2 ZT800 整合石墨烯電極之氣體感測器 95 4.5 二氧化氮氣體感測機制 99 第五章 結論與未來展望 101 5.1 結論 101 5.2 未來展望 102 參考文獻 103

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