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研究生：	盧建勳 Jian-Shiun Lu
論文名稱：	鐵芯式永磁同步伺服線性馬達應用於高精密度定位平台之運動控制與設計 High Precision Motion Control and Design in Position Platform for Linear Permanent－Magnet Iron Core Synchronous Motors
指導教授：	陳美勇 Chen, Mei-Yung
學位類別：	碩士 Master
系所名稱：	機電工程學系 Department of Mechatronic Engineering
論文出版年：	2012
畢業學年度：	101
語文別：	中文
論文頁數：	131
中文關鍵詞：	高精密度定位控制平台、鐵芯式永磁同步伺服線性馬達、適應性步階迴歸滑模控制器(ABSMC) 、變速度控制器(VSC) 、遞迴式類神經網路補償控制器(RNNC)
英文關鍵詞：	high precision positioning control platform, linear permanent-magnet iron core synchronous motor, adaptive back-stepping sliding mode controller(ABSMC), variable speed controller(VSC), recurrent neural network compensative controller(RNNC)
論文種類：	學術論文
相關次數：	點閱：310 下載：13
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本研究之主要目的為建置一部高精密度定位控制平台，且為了達到次微米等級之精密控制，我們設計了四種控制器作為提升定位平台系統精密度的方法，分別為兩個系統主要控制器與兩個輔助控制器，其中主要控制器包含了PID控制器與適應性步階迴歸滑模控制器（ABSMC），而輔助控制器則有變速度控制器（VSC）與遞迴式類神經網路補償控制器（RNNC）。
在高精密度定位平台之控制性能中，有兩項控制性能是必備的，即高精密定位控制與高精密動態軌跡追蹤控制的能力。因此我們將比較兩個主控制器PID與ABSMC在上述兩項控制性能上的優劣，最後選定性能優者為本系統之主控制器。
當高精密度定位平台在執行定位控制的過程中，往往因為較嚴重的暫態超越量，影響定位控制的精密度，所以我們將系統主控制器結合VSC輔助控制器為系統暫態效能做改善。而在執行動態軌跡追蹤控制的過程中，其動態軌跡移動之反曲點通常會有較大的追蹤誤差出現，此也是造成定位平台精密度不足的主因，在此我們將系統主控制器結合RNNC輔助控制器，改善系統動態反曲點之最大誤差量。
本研究之高精密定位平台控制，主要由鐵芯式永磁同步伺服線性馬達作為驅動系統，其最大行程為200mm，而光學尺之精密度為0.1μm，在系統控制器設計方面，主要是採用LabVIEW 2010 Professional Development System，作為控制器程式設計之軟體與操作介面。

The main purpose of this study is to build a high precision positioning control platform. In order to achieve high-precision control, we designed four controllers to enhance the precision of the positioning platform to sub-micron level. These controllers can be divided into two categories of main controller and auxiliary controller. The main controllers contain a PID controller and an adaptive back-stepping sliding mode controller (ABSMC). As well as the auxiliary controllers contain a variable speed controller (VSC) and a recurrent neural network compensative controller (RNNC).
High-precision positioning control and dynamic tracking control are the necessary abilities in high precision positioning control platform. For these reasons, we compared the PID and ABSMC the pros and cons of these two control performance. Then, we selected the excellent one to be the main controller of the system.
The precision of positioning control is disturbed by serious transient overshoot in the positioning platform system. Therefore, we combined the main controller with the auxiliary controller of VSC to improve the transient performance of the system. However, in the process of dynamical tracking control, the maximum tracking errors usually appear in the dynamic inflection points. Therefore, we combined the main controller with the auxiliary controller of RNNC to improve the performance of dynamic inflection points.
In this study, we chose the linear permanent-magnet iron core synchronous motors drive system on the positioning platform and the maximum stroke is 200mm. The resolution of the linear scale is 0.1μm. In the controller design, we utilize LabVIEW 2010 Professional Development System to program the system code and develop the human-machine interface.

摘要 ................................................ i
Abstract ........................................... ii
誌謝 ................................................ iv
目錄 ................................................ v
圖目錄 .............................................. viii
表目錄 .............................................. xiv

第一章 緒論 .......................................... 1
1 前言 ............................................ 1
2 文獻回顧 ........................................ 3
3 研究動機與目的 ................................... 11
4 本研究之貢獻 ..................................... 12
5 論文架構 ........................................ 13

第二章 理論基礎 ..................................... 14
1   線性馬達簡介 .................................. 14
1.1 線性馬達之種類與變化 ........................... 15
1.2 線性馬達與滾珠導螺桿之驅動系統性能比較 ........... 16
1.3 線性馬達之座標轉換 ............................. 17
2   高階控制器之設計原理解說 ........................ 24
2.1 Lyapunov 穩定性理論 ........................... 28
2.2 可變結構控制理論 ............................... 30
2.3 Lyapunov 控制器設計法 ......................... 31
2.4 線性馬達之速度迴路控制 ......................... 34
3   線性馬達之干擾模型 ............................. 36
3.1 摩擦力之介紹 .................................. 36
3.2 漣波效應( Ripple effect ) .................... 42

第三章 實驗設備介紹 ................................. 44
1 高精密度定位平台控制系統 ........................ 45
2 鐵芯式永磁同步伺服線性馬達 ...................... 46
3 線性馬達驅動器 ................................. 48
4 光學量測系統之線性編碼器 ........................ 50
5 線性滑軌 ....................................... 51
6 資料擷取卡 ..................................... 53

第四章 系統動態模型之建立 ............................ 54
1 高精密度定位平台控制系統之致動分析 ................ 54
2 鐵芯式永磁同步伺服線性馬達之推力模型分析 ........... 56
3 高精密度定位平台之系統動態模型 .................... 63

第五章 系統控制器設計 ................................ 64
1   主控制設計－PID控制器 .......................... 66
1.1 調整PID控制參數－Ziegler-Nichols 演算法 ........ 69
1.2 調整PID控制參數－Chien-Hrones-Reswick演算法 .... 72
1.3 調整PID控制參數－Cohen-Coon演算法 .............. 73
2   主控制器設計－適應性步階回歸滑模控制器（ABSMC）.... 74
3   輔助控制器設計－變速度控制器（VSC） .............. 81
4   輔助控制器設計－遞迴式類神經網路補償控制器（RNNC）.. 88

第六章 實驗結果與討論 ................................. 94
1   高精密度定位平台之主控制器選定 ................... 95
1.1 定位控制－PID與ABSMC之實驗結果 .................. 95
1.2 動態軌跡追蹤控制－PID與ABSMC之實驗結果 .......... 102
1.3 系統主要控制器 ................................ 104
2   主控制器ABSMC之負載強健性能評估與問題分析 ........ 105
2.1 定位控制實驗－負載強健性能測試 .................. 105
2.2 問題分析：ABSMC定位控制之強健性 ................ 108
2.3 動態軌跡追蹤控制實驗－負載強健性能測試 ........... 109
2.4 問題分析：ABSMC追跡控制之強健性 ................ 111
3   定位控制效能改善－ABSMC結合VSC之實驗結果 ........ 112
3.1 總結：定位控制效能改善成果 ..................... 117
4   動態軌跡追蹤控制－ABSMC結合RNNC之實驗結果 ....... 118
4.1 總結：動態軌跡追蹤控制效能改善成果 .............. 123

第七章 結論與未來展望 ................................ 124

參考文獻 ........................................... 126

                                

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