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研究生: 周承穎
Chou, Cheng-Ying
論文名稱: 利用超快雷射製程製備石墨烯結構元件應用氣體偵測之研究
Investigation on Graphene Structure Devices by Ultrafast Laser Processing Technology for Gas Detection
指導教授: 張天立
Chang, Tien-Li
口試委員: 何正榮
Ho, Jeng-Rong
莊賀喬
Chuang, Ho-Chiao
鄭中緯
Cheng, Chung-Wei
張天立
Chang, Tien-Li
陳順同
Chen, Shun-Tong
楊啟榮
Yang, Chii-Rong
口試日期: 2022/01/27
學位類別: 博士
Doctor
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 121
中文關鍵詞: 超快雷射皮秒雷射石墨烯薄膜電極結構奈米線微溝槽氣體偵測
英文關鍵詞: Ultrafast laser, Picosecond laser, Graphene thin films, Electrode structures, Nanowires, Microgroove, Gas detection
DOI URL: http://doi.org/10.6345/NTNU202200344
論文種類: 學術論文
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  • 摘要 I Abstract II 總目錄 III 圖目錄 VI 表目錄 XII 第一章 緒論 1 1.1 前言 1 1.2 研究動機與目的 3 1.3 超快雷射製程技術 5 1.3.1超快雷射之特性 6 1.3.2超快雷射之定義 7 1.4 氣體偵測元件 8 1.4.1氣體偵測元件的基本結構和特性 8 1.4.2氣體偵測元件的偵測機制 10 1.5 奈米線製程技術 12 1.5.1 水熱法 13 1.5.2 電紡絲法 14 1.6 氣體偵測元件的偵測材料 14 第二章 理論基礎與文獻回顧 17 2.1 超快雷射製程 19 2.2 氣體偵測材料 22 2.2.1 水熱法製作氧化鋅奈米線 23 2.3 以電紡絲法製作高分子奈米纖維 26 2.4 氣體偵測元件 27 第三章 研究設計 38 3.1 研究方法 38 3.2 石墨烯薄膜基板製作 39 3.3 氣體偵測元件的電極結構設計 40 3.3.1螺旋電極設計 40 3.3.2 指叉狀電極設計 43 3.4 超快雷射於石墨烯薄膜表面圖案化與結構化 43 3.5 氣體偵測元件製作 48 3.5.1無線傳輸式氣體偵測元件 48 3.5.2 直接傳輸式氣體偵測元件 49 3.5.2.1 ZnO奈米線氣體偵測元件 49 3.5.2.2 還原氧化石墨烯氣體偵測元件 51 3.6 氣體偵測機制 55 第四章 結果與討論 59 4.1 超快雷射圖案化與結構化 59 4.1.1 石墨烯膜薄製作與特性量測 59 4.1.2 超快雷射於石墨烯薄膜表面圖案化 61 4.1.3 超快雷射於石墨烯薄膜表面製作V型溝槽 72 4.2 無線氣體偵測元件 75 4.2.1 元件結構 75 4.2.2 偵測機制 75 4.2.3 一氧化碳氣體偵測 77 4.3 ZnO奈米線氣體偵測元件 79 4.3.1 具指叉狀電極的ZnO奈米線氣體偵測元件 80 4.3.2 具有V型溝槽的ZnO奈米線氣體偵測元件 85 4.3.3 ZnO奈米線對氣體的偵測機制 91 4.3.4 ZnO氣體偵測元件對一氧化氮氣體偵測 93 4.4 還原氧化石墨烯氣體偵測元件 95 4.4.1 偵測機制 97 4.4.2 rGO氣體偵測元件 98 4.4.3 rGO氣體偵測元件對一氧化氮氣體偵測 100 第五章 結論 105 第六章 未來展望 109 6.1 前言 109 6.2 未來展望 109 參考文獻 111

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