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研究生： 蔡永賢
Yung-Hsien Tsai
論文名稱： 雷射直寫式光波導之毛邊研究
Study of Sidewall Roughness on Direct Laser Writing Optical Waveguide
指導教授： 曹士林
Tsao, Shyh-Lin
江家慶
Chiang, Chia-Chin
學位類別： 碩士
Master
系所名稱： 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2007
畢業學年度： 95
語文別： 中文
論文頁數： 102
中文關鍵詞： 波導毛邊 、雷射直寫
英文關鍵詞： waveguide roughness, direct laser writing
論文種類： 學術論文
相關次數： 點閱：171  下載：3 
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    • 本文為研究製程所造成的光波導之毛邊現象，並且利用雷射直寫的方式來製作光波導。我們首先利用Nd：YVO4雷射在石英玻璃上寫出埋入式波導，經由改變不同的雷射功率及寫入速度，我們得到最佳的波導形式。此外，我們也使用長脈衝雷射（Nd：YAG）及短脈衝雷射（Nd：YVO4）兩種雷射在矽晶絕緣體 (SOI) 晶圓上寫出脊狀光波導，我們亦在矽晶絕緣體晶圓上寫出不同角度折線的波導，並且發現到由於矽晶格的影響，會使得在不同角度所寫出來的波導會有不同的毛邊現象。並於此論文中，對於矽晶絕緣體晶圓上在長脈衝雷射及短脈衝雷射的加工影響提出比較與探討。

    This thesis is a research on the procedure of the roughness in regards to the waveguide’s sidewall utilizing direct writing laser to fabricate optical waveguides. We will first use Nd：YVO4 laser to writing buried channel waveguides on quartz glass. We obtained the optimum waveguide by experimenting with different power level of the laser and the speeds in writing. Moreover, we used two types of lasers, the long pulse (Nd：YAG) and short pulse (Nd：YVO4 ) laser, to write rib waveguide on silicon on insulator (SOI) wafer. We also wrote waveguides with reflections from different angles on the SOI. After doing so, we discovered that because of the silicon’s lattice structure, the waveguides with different roughness are obtained when written at different angles. Within the contents of this thesis, we have compared and examined the influence of the use of the long pulse and the short pulse laser machining on SOI.

    Chapter 1 Introduction…………………………………......……1 Chapter 2 Optical Waveguide…………………………..…..…7 2-1 Basic Theory of Wave Propagation in Waveguide...…………….....……8 2-2 Common Analysis Methods for Optical Waveguide…………….……..12 2-3 Analysis of Optical Waveguide Fabrication Caused Defects………….14 2-3-1 Sidewall’s Roughness in Straight Waveguide ...………………...14 2-4 Simulation of Discontinuities in Optical Waveguide…………………17 2-4-1 Simulation of Waveguide Fabrication Caused Defects .………...17 2-4-2 Simulation of a Regular Waveguide’s Sidewall Defects…….19 2-5 Summary.……………...…...…………………………………..………21 Chapter 3 Laser Direct-writing Optical Waveguides in Fused Quartz Glass…….…………………..……..…..…29 3-1 Introduction of Laser-Fabricated Waveguide Devices....…...…30 3-1-1 Laser Direct-writing of Buried Waveguides in Glass………….31 3-2 Direct-writing Device Fabrication Process…………………….…..…34 3-2-1 Neodymium-Doped Yttrium Orthovanadate (Nd:YVO4) Laser...35 3-2-2 Setup for Waveguide Writing………………………………….....36 3-3 Results of Direct-writing Channel Waveguide in Fused Quartz Glass.. 37 3-3-1 Analysis of Waveguides with Writing Speed of 5 mm/s………...37 3-3-2 Analysis of Waveguides with Writing Speed of 25 mm/s and 50mm/s…………………………………………………………39 3-4 Discussion and Summary.......…………………………………..…41 Chapter 4 Laser Machining for SOI Wafer…………………58 4-1 Introduction of Laser Micromachining………………………………59 4-2 Fabrication Process of Direct-Writing Rib Waveguide Based on SOI…62 4-3 Results of Direct-Writing Rib Waveguide Based on SOI……………65 4-3-1 Analysis of the Writing Waveguides on SOI by Nd:YVO4 Laser.65 4-3-2 Analysis of the Writing Waveguides on SOI by Nd:YAG Laser..67 4-4 Discussion and Summary……………………………………………70 Chapter 5 Conclusions…………………………………………….90 References..……………………………………………………………..93

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