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研究生: 張瑋軒
論文名稱: 氮銻砷化鎵薄膜的光調制光譜研究
指導教授: 陸健榮
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 94
中文關鍵詞: 氮銻砷化鎵光調制
英文關鍵詞: GaAsSbN, PR
論文種類: 學術論文
相關次數: 點閱:115下載:1
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  • 我們是以光調制吸收光譜(PR),對半導體材料氮銻砷化鎵做探討。在光調制光譜的變溫實驗裡,我們引用了Double BAC Model
    確定了氮銻砷化鎵的能隙。此外也發現了在能隙以下,存在一個可能是侷限態的躍遷訊號,藉由參考了一些處在侷限態的載子隨溫度變化的相關理論分析與模型,得知在高溫時侷限能態會逐漸被載子所佔滿 ,可以解釋侷限能態的躍遷能量隨溫度變化的情形。
    在使用不同波長雷射為調制源的光調制光譜,經過比較兩不同波長雷射得到的實驗結果,可以得知我們所量測到的調制訊號,分別來自材料氮銻砷化鎵本身,以及來自於砷化鎵基板與材料氮銻砷化鎵的界面附近。此外我們也藉著比較摻雜不同銻與氮濃度的樣品的實驗結果,來了解摻雜濃度對材料的影響。

    致 謝 I 摘 要 II 目 錄 III 第一章 簡 介 1 第二章 原理介紹 4 2.1電子躍遷理論 4 2.2 物質光學常數 8 2.3 調制光譜基本原理 15 2.4電場調制 19 2.5 弱電場調制 23 2.6 光壓效應 25 第三章 樣品結構與實驗裝置 27 3.1 樣品結構 27 3.2 光調制實驗 27 第四章 實驗結果與分析 31 4.1 氦氖雷射調制的實驗結果與分析 32 4.2 不同波長雷射調制的實驗結果與討論 62 4.3 不同濃度樣品的比較結果 70 第五章 結論與展望 80 參考文獻 82

    1.W. Shan, W. Walukiewicz, K. M. Yu, J. W. Ager III, E. E. Haller, J. F. Geisz, D. J. Friedman, J. M. Olson, S. R. Kurtz, H. P. Xin and C. W. Tu, ”Band Anticrossing in III–N–V Alloys,” phys. stat. sol. (b), Vol. 223, p. 75-85, 2001.

    2.Masahiko Kondow, Takeshi Kitatani, Shin’ichi Nakatsuka,
    Michael C. Larson, Kouji Nakahara, Yoshiaki Yazawa, Makoto
    Okai, Member, IEEE and Kazuhisa Uo mi, “GaInNAs: a novel
    material for long-wavelength semiconductor lasers,” IEEE J.Select. Topics Quantum Electron., Vol. 3, p. 719-730, 1997.

    3.G. Ungaro, G. Le Roux, R. Teissier and J.C. Harmand, “GaAsSbN: a new low-bandgap material for GaAs substrates,”
    Electron. Lett., Vol. 35, p. 1246-1248, July 1999.

    4.J.C. Harmand, G. Ungaro, J. Ramos, E.V.K. Rao, G.
    Saint-Girons, R. Teissier, G. Le Roux, L. Largeau and G.
    Patriarche, “Investigations on GaAsSbN/GaAs quantum wells
    for 1.3–1.55 mm emission,” J. Crystal Growth, Vol.
    227–228, p. 553–557, 2001.

    5.E. V. K. Rao, A. Ougazzaden, Y. Le Bellego and M. Juhel, “Optical properties of low band gap GaAs1-xNx layers: Influence
    of post-growth treatments,” Appl. Phys. Lett., Vol. 72, p.
    1409-1411, 1998.

    6.L. Grenouillet, C. Bru-Chevallier, and G. Guillot, P. Gilet, P. Duvaut, C. Vannuffel, A. Million and A. Chenevas-Paule, “Evidence of strong carrier localization below 100 K in a GaInNAs/GaAs single quantum well,” Appl. Phys. Lett., Vol. 76, p.2241-2243, 2000.

    7.I. A. Buyanova, W. M. Chen, G. Pozina, J. P. Bergman and B.Monemar, H. P. Xin and C. W. Tu, “Mechanism for low-temperature photoluminescence in GaNAs/GaAs structures grown by molecular-beam epitaxy,” Appl. Phys. Lett., Vol. 75, p.501-503, 1999.

    8.H. P. Xin, K. L. Kavanagh, Z. Q. Zhu and C. W. Tu,
    “Observation of quantum dot-like behavior of GaInNAs in GaInNAs/GaAs quantum wells,” Appl. Phys. Lett., Vol. 74, p. 2337-2339, 1999.

    9.M.-A. Pinault and E. Tournie, ”On the origin of carrier
    localization in Ga1-xInxNyAs1-y/GaAs quantum wells,” Appl. Phys. Lett., Vol. 78, p. 1562-1564, 2001.

    10.A. Polimeni, M. Capizzi, M. Geddo, M. Fischer, M. Reinhardt and A. Forchel, “Effect of temperature on the optical properties of (InGa)(AsN)/GaAs single quantum wells,” Appl. Phys. Lett., Vol. 77, p. 2870-2872, 2000.

    11.F. Bousbih, S.B. Bouzid, A. Hamdouni, R. Chtourou and J.C. Harmand, “Effect of rapid thermal annealing observed by photoluminescence measurement in GaAs1−xNx layers,” Mater. Sci. Eng. B, Vol. 123, p. 211–215, 2005.

    12.S. Y. Xie, S. F. Yoon and S. Z. Wang, “Photoluminescence properties of p-type InGaAsN grown by rf plasma-assisted molecular beam epitaxy,” J. Vac. Sci. Technol. B, Vol. 23, p. 149-152, 2005.

    13.J. Li, S. Iyer, S. Bharatan, L. Wu, K. Nunna and W. Collis,
    “Annealing effects on the temperature dependence of photoluminescence characteristics of GaAsSbN single-quantum wells,” J. Appl. Phys., Vol. 98, p. 013703-1-6, 2005.

    14.S. A. Lourenço, I. F. L. Dias, L. C. Poças, and J. L. Duarte, J. B. B. de Oliveira and J. C. Harmand, “Effect of temperature on the optical properties of GaAsSbN/GaAs single quantum wells grown by molecular-beam epitaxy,” J. Appl. Phys., Vol. 93, p. 4475-4479, 2003.

    15.T. K. Ng, S. F. Yoon, S. Z. Wang, W. K. Loke and W. J. Fan, ” Photoluminescence characteristics of GaInNAs quantum wells annealed at high temperature,” J. Vac. Sci. Technol. B, Vol. 20, p. 964-968, 2002.

    16.Sho Shirakata, “Photoluminescence and photoreflectance of GaInNAs single quantum wells,”Appl. Phys. Lett.,
    Vol. 79, p. 54-56, 2001.

    17.J. C. Harmand, G. Ungaro, L. Largeau and G. Le Roux,
    “Comparison of nitrogen incorporation in molecular beam
    epitaxy of GaAsN,GaInAsN, and GaAsSbN,” Appl. Phys.
    Lett.,Vol. 77, p. 2482-2484, 2000.

    18.F. Bousbih, S. Ben Bouzid, R. Chtourou, F.F Charfi, J.C. Harmand and G. Ungaro, “Effect of nitrogen in the electronic structure of GaAsN and GaAsSb(N) compounds,” Mater. Sci. Eng. C, Vol. 21, p. 251–254, 2002.

    19.Fang-I Lai, S. Y. Kuo, J. S. Wang, H. C. Kuo, S. C. Wang, H. S. Wang, C. T. Liang and Y. F. Chen, “ Effect of nitrogen contents on the temperature dependence of photoluminescence in InGaAsN/GaAs single quantum wells,” J. Vac. Sci. Technol. A, Vol. 24, p. 1223-1227, 2006.

    20.M. Fischcr, M. Reinhardt and A. Forchel, “GalnAsN/GaAs laser diodes operating at 1.52pm,” Electron. Lett., Vol. 36, p. 1208-1209, 2000.

    21.L. F. Bian, D. S. Jiang, S. L. Lu, J. S. Huang, K. Chang, L. H. Li and J. C. Harmand, “The effect of inserting strain-compensated GaNAs layers on the luminescence properties of GaInNAs/GaAs quantum well,” J. Crystal Growth, Vol. 250, p. 339–344, 2003.

    22.X. Yang, J. B. He´ roux, L. F. Mei and W. I. Wang,
    “InGaAsNSb/GaAs quantum wells for 1.55 mm lasers grown by molecular-beam epitaxy,” Appl. Phys. Lett., Vol. 78, p.
    4068-4070, 2001.

    23.H. Luo, J. A. Gupta and H. C Liu, “1.55 μm GaNAsSb
    photodetector on GaAs,” Appl. Phys. Lett., Vol. 86,
    p.211121-1-3, 2005.

    24.J W Ager III and W Walukiewicz, “Current status of research and development of III–N–V semiconductor alloys,” Semicond. Sci. Technol., Vol. 17, p. 741–745, 2002.

    25.Singh,Jasprit,“Electronic and Optoelectronic properties of semicounductor structures”,Cambridge,New York
    ,p.345,2003

    26.J.J Sakurai,“Modern Quantum Mechanics ”,Addison
    Wesley,p.322,1994

    27. F.Ablese,“Optical Properties of Solids, chap.2, Amsterdam:North-Holland Pub.Co.:New York:American Elsevier(1972).

    28.B. O. Seraphin,“The effect of an Electric Field on
    Reflectivity Hulin” ,Academic, Dunod, Paris (1964).

    29.D. Huang, G. Ji, U. K. Reddy, H. Morkoc, F. Xiong and T.
    A.Tombrello, “Photoreflectance, Absorption, and Nuclear
    Resonance Reaction Studies of AlxGa1-xAs Grown by
    Molecular-Beam Epitaxy”,J. Appl. Phys., Vol. 63,
    p. 5447-5443 (1998).

    30.Alok K. Berry, D. K Gaskill and G. T. Stauf, “Photoreflectance of semi-insulating InP: Resistivity effects on the exction phase”, Appl. Phys. Lett. Vol. 58,p2824-2826 (1991).

    31.O. J. Glembocki, N. Bottka and J. E. Fuxrneaux, “Effects if Impurity Transition on Electroreflectance in Thin Epitaxial GaAs and Ga1-xAlxAs/GaAs layers”, J. Appl. Phys., Vol. 57, p. 432-437 (1985).

    32.F. H. Pollak, O. J. Glembocki, Spectroscopic
    Characterization Techniques for Semiconductor Technology
    III, Vol.946. (SPIE, California, 1988), p.2-35.

    33.B. O. Seraphin and N. Bottka,“Band-Structure Analysis from Electro-Reflectance Studies”,Phys. Rev. 145,p.628 (1966)

    34.Landau and Lifshitz , “Quantum Mechanics”, 2nded.
    ,Mathematical Appendices.

    35.D. E. Aspnes“Electric-Field effects on optical Absorption near Thresholds in soild”,Phys. Rev.Vol.147,p.554(1966)

    36.K. Suzuki, and J. C. Hensel, Bull. Am. Phys. Soc. 14, 113(1969).

    37.T. S. Moss, “Handbook on Semiconductors”, North Holland,N. Y. ,Vol. 2. p.109 (1980)

    38.M. Cardona, “Modulation Spectroscopy”, Academic, N.
    Y.(1969).

    39.H.Shen and M.Dutta,“Franz-Keldysh oscillations in
    modulation spectroscopy”J. Appl. Phys. Vol. 98,p.2151
    (1995)

    40.陳右喻,”砷化鎵/砷化氮鎵 量子井的調制光譜研究”,台灣師範
    大學碩士論文.(2001)

    41.W. Shan, W. Walukiewicz, and J. W. Ager III,” Band
    Anticrossing in GaInNAs Alloys”,phys. Review.Lett,Vol.82,
    Number 6,p.1221-1224 (1999)

    42.I. Suemune, K. Uesugi, and W. Walukiewicz,“Role of nitrogen in the reduced temperature dependence of band-gap energy in GaNAs”Appl. Phys. Lett.77,p.3021 (2000).

    43.C. Skierbiszewski, P. Perlin, P. Wisniewski, T. Suski, J.
    F. Geisz, K.Hingerl, W. Jantsch, D. E. Mars, and W.
    Walukiewicz,“Band structure and optical properties of
    InyGa1-yAs1-xNx alloys”, Phys. Rev. B 65,p.035207 (2002).

    44.Skierbiszewski, P. Perlin, P. Wisniewski, W. Knap, T. Suski, W. Walukiewicz,W. Shan, K. M. Yu, J. W. Ager, E. E. Haller, J. F. Geisz, and J. M.Olson,“Large, nitrogen-induced increase of the electron effective mass in In Ga N As ” Appl. Phys. Lett. 76,p.2409 (2000).

    45.S. A. Lourenc, I. F. L. Dias1, J. L. Duarte1, E. Laureto1, V. M. Aquino1, and J. C. Harmand,“Temperature-Dependent Photoluminescence Spectra of GaAsSb/AlGaAs and GaAsSbN/GaAs Single QuantumWells under Different Excitation Intensities”,J.Appl.Phys.Vol.37.
    no.4 ,p.1212-1218 (2007)

    46.李佳任,”砷化鎵/砷化銦 量子點的電光性質”,台灣師範大學碩士論文,(2001)

    47.J. D. Perkins, A. Mascarenhas, Yong Zhang, J. F. Geisz, D. J. Friedman, J. M. Olson, and Sarah R. Kurtz, “Nitrogen-Activated Transitions, Level Repulsion, and Band Gap Reduction in GaAs1-xNx with x <0.03”, Phys. Review.Letters,Vol.82,Number 16,p.3312-3315 (1999).

    48.K. Alberi, J. Wu, W. Walukiewicz, K. M. Yu, O. D. Dubon, S. P. Watkins,C. X. Wang, X. Liu, Y. J. Cho, and J. Furdyna,“Valence-band anticrossing in mismatched III-V semiconductor alloys” Phys. Rev. B 75,p.045203 (2007).

    49.Yan-Ting Lin,Ta-Chun Ma,Tsung-Yi Chen,and Hao-Hsiung Lin
    “Energy gap reduction in dilute nitride GaAsSbN”
    AppL.Phys.Lett.93,p.171914(2008).

    50.S. Tiwari and D. J. Frank,“Empirical fit to band
    discontinuities and barrier heights in Ⅲ-Ⅴ alloy systems”Appl. Phys. Lett. 60,p.630 (1992).

    51.X. Gonze, J. P. Michenaud, and J. P. Vigneron,
    “ First-principles study of As, Sb, and Bi electronic
    properties” Phys. Rev.B 41,p.11827 (1990)

    52.Ryuji Katayama,Kentaro Onabe,Yasuhiro Shiraki,”Built-in electric field at cubic GaN/GaAs(001) heterointerfaces investigated by phase-selected photoreflectance excitation”Phy.stat.sol.(b)241,No.12,p.2749-2753

    53.D.K.Cheng,” Field and wave electromagnetics”,chap.8

    54.施敏,”半導體元件物理與製作技術”,國立交通大學出
    社,p.800

    55.J.Plaza,J.L.Castano,and B.J.Garcia, “Temperature dependence of photoluminescence and photoreflectance spectra of dilute GaAsN alloys”,Appl.Phys.Lett.86,
    p.121918 (2005)

    56.M. Weyers, M. Sato, and H. Ando, “Red shift of photoluminescence and absorption in dilute GaAsN alloy layers,” Jpn. J. Appl. Phys., vol.31,pp.L853-L833 (1992)

    57.R. E. Nahory, M. A. Pollack, J. C. Dewinter, and K. M. Williams,“Growth and properties of liquid-phase epitaxy GaAs1-xSbx,” J. Appl.73 Phys.,vol. 48, p.1607-1614 (1977).

    58.Charles Kittel “Introduction to Solid State Physics”,Wiley,p.436

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