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研究生: 林啟升
Lin, Chi-Sheng
論文名稱: 磁性異質結構之自旋轉矩鐵磁共振與自旋流轉換效率研究
Spin-Torque Ferromagnetic Resonance and the Charge-to-Spin current Conversion Efficiency of Magnetic Heterostructures
指導教授: 江佩勳
Jiang, Pei-hsun
口試委員: 江府峻 黃依萍
口試日期: 2021/06/30
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 69
中文關鍵詞: 自旋–軌道耦合鐵磁性材料鐵磁共振自旋轉矩鐵磁共振
研究方法: 實驗設計法
DOI URL: http://doi.org/10.6345/NTNU202101050
論文種類: 學術論文
相關次數: 點閱:161下載:0
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  • 本實驗透過電子束蒸鍍儀系統成長出15 nm/15 nm的Permalloy/Platinum雙層磁性材料透過銅箔及金製成的共平面波導(Coplanar waveguide,CPW)輸入微波訊號使樣品產生自旋轉矩鐵磁共振(Spin- torque Ferromagnetic resonance,ST-FMR)時在該結構的兩端量到一個電壓差(Vmix)並推算出其磁化飽和強度(Saturation magnetization,Ms),其在自旋電子學之應用中扮演相當重要的角色,它的實用性和廣泛使用主要是因為它是一種共振現象,其中較有效率的方法則是利用本身具有強自旋軌道耦合(Spin-orbit-coupling,SOC)的材料(如重原子金屬)中所發現的自旋霍爾效應(Spin Hall effect,SHE)。其能產生方向和外加電流垂直的自旋電流。本實驗有助於了解所產生的信號Vmix,由勞倫茲式(Lorentzians)及反勞倫茲式(Anti-Lorentzian)的組合,並透過測量不同頻率與磁場變化的共振磁場相關性比較其他不同製程找出品質穩定且較優良的方法,並分析出我們的自旋轉換效率為0.2044與其他期刊比較有較高的轉換效率,以及對角度變化的依賴性及各項力矩貢獻。

    摘要 i 目錄 ii 圖目錄 v 表目錄 viii 第1章 介紹 1 第2章 緒論 2 2-1文獻回顧 2 2-1-1 NbSe2 /Py雙層二維結構的自旋轉矩鐵磁共振 2 2-1-2 Bi2Se3/Py雙層二維結構的自旋轉矩鐵磁共振 3 2-2 拓樸絕緣體(Topological insulator) 4 2-3 磁性材料 5 2-3-1 亞鐵磁材料(Ferrimagnetism) 5 2-3-2 鐵磁材料( Ferromagnetic) 6 2-3-3 順磁材料(Paramagnetism) 6 2-4 各向異性磁阻(Anisotropic magnetoresistance) 6 2-5 理論 7 2-5-1 自旋電子學(Spintronics) 7 2-5-2 自旋-軌道偶合(Spin-Orbit Coupling) 8 2-5-3 鐵磁共振(Ferromagnetic resonance,FMR) 9 2-5-4 Landau–Lifshitz–Gilbert equation 9 2-5-5 自旋霍爾效應(Spin Hall effect) 10 2-6 自旋轉矩鐵磁共振(Spin-torque Ferromagnetic resonance,ST-FMR) 11 2-7 共平面波導( Coplanar waveguide,CPW) 14 第3章 實驗儀器與製程方法 15 3-1 實驗儀器與原理 15 3-1-1 電子束蒸鍍儀(Electron beam evaporation) 17 3-1-2 脈衝雷射濺鍍系統(Pulsed Laser Deposition,PLD) 18 3-1-3 場發式電子掃描顯微鏡(Scanning Electron Microscope,SEM) 20 3-1-4 電子束微影(e-beam lithography) 21 3-1-5 接觸式光罩曝光機(Mask aligner) 23 3-1-6 紫外光-發光二極體曝光機(Ultraviolet light-emitting diode lithography ) 24 3-1-7 離子束蝕刻機(Ion beam etching) 26 3-1-8 電漿蝕刻機(Plasma etcher) 26 3-1-9 金線銲線機(Gold wire bonder) 28 3-1-10 向量網路分析儀(Vector network analyzer,VNA) 29 3-1-11 室溫磁鐵 30 3-2 最終製程方法 31 3-2-1 清洗基板 33 3-2-2 旋塗光阻劑 33 3-2-3 軟烤(Soft roast) 36 3-2-4 微影曝光及顯影 36 3-2-5 硬烤(Hard roast) 38 3-2-6 乾式蝕刻 38 3-2-7 成長樣品 39 3-2-8 舉離(Lift off) 40 3-2-9 製作共平面波導 40 第4章 實驗測量結果與討論 42 4-1 實驗測量方法 42 4-2 Py/Pt ST-FMR之Vmix 44 4-3 Vmix的對稱與反對稱 47 4-4 ST-FMR共振磁場 51 4-5 ST-FMR之Ms值 53 4-6自旋霍爾角 54 4-7 實驗結論與未來展望 55 4-7-1 實驗結論 55 4-7-2 未來展望 58 參考文獻 59 補充 64 1.補充缺點及造成失敗情況的注意事項 64

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