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研究生: 曾暄君
Hsuan-Chun,Tseng
論文名稱: 以磁光科爾效應及鐵磁共振研究鈷鐵硼銅薄膜磁性行為
Studies Magnetic Behavior of CoFeBCu Films by means of MOKE and FMR
指導教授: 盧志權
Lo, Chi-Kuen
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 81
中文關鍵詞: 鈷鐵硼鐵磁共振磁光科爾效應共濺鍍
論文種類: 學術論文
相關次數: 點閱:121下載:4
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  • 磁控式共濺鍍(Co40Fe40B20)1-xCux薄膜成長於SiO2/Si(100)基板上,總厚度40nm的薄膜x從0至44%,而50nm的則從0至68%;樣品的比例成份及縱深分佈分別用X射線光電子能譜及二次離子質譜來分析,薄膜樣品的表貌則使用原子力顯微鏡來檢測;樣品的磁性行為則是用MOKE與FMR來測量。40nm薄膜的表面平均粗糙度為0.4-1.7nm,銅比例在15-37%範圍間,粗糙度與晶粒大小隨銅比例增加而提高,當銅增加至44%時,粗糙度與晶粒尺寸開始下降;從X射線繞射(XRD)數據得知參雜銅於鈷鐵硼中具有非晶態結構,但當銅增加至66%時XRD在2θ=43.5°出現微弱Cu(111)訊號。
    使用縱向磁光科爾儀量測磁滯曲線,發現參雜些微的銅在薄膜平面上出現磁異向性,並以鐵磁共振儀量測微波訊號下共振磁場位置,數據顯示磁易軸矯頑場(Hc)以及角度0°的共振磁場(Hres)皆隨著銅比例增加而降低,40nm銅比例從0升高至44%,Hc從106降低為37.5Oe,Hres從10.8降至7.5KOe,50nm銅從0增加至68%,Hc從105降低為13Oe,Hres從12.5降至5.5KOe,矯頑場降低的原因是銅比例增加使鐵磁物質含量變少,造成鐵磁物質間交換耦合變弱,這與共振磁場隨銅比例增加導致材料內鐵磁耦合減弱而降低的結果一致。
    鈷鐵硼銅的阻尼常數,40nm薄膜阻尼常數介於0.010-0.019的範圍,50nm薄膜阻尼常數為0.008-0.017,比預期的阻尼常數相比有偏高的趨勢,推測是參雜銅造成薄膜不同區域地磁矩進動方向與頻率的不一致,導致阻尼常數提高。

    第一章 緒論 1 1-1 研究動機 1 1-2 文獻回顧 2 第二章 磁性理論 6 2-1 磁性的來源 6 2-2 磁性物質的分類 7 2-3 磁性物質的特性 10 2-4 磁異向性 14 第三章 實驗方法的理論基礎 17 3-1 磁光科爾效應(Magneto optics Kerr effect,簡寫為MOKE) 17 3-1-1 光的偏振 (polarization) 18 3-1-2 複數折射率 (complex refractive index) 18 3-1-3 菲涅耳方程式(Fresnel equation) 20 3-1-4 介電理論 21 3-2 鐵磁共振 23 3-3 表面分析儀器 30 第四章 研究方法 34 4-1 實驗流程 34 4-2 樣品製作 34 4-3 儀器介紹 39 第五章 實驗結果與分析 45 5-1 樣品成分分析 45 5-2 二次離子質譜儀 50 5-3 X射線繞射實驗數據 53 5-4 原子力顯微鏡表面形貌分析 56 5-5 MOKE實驗數據 58 5-6 FMR實驗數據 67 第六章 結論 77 6-1 結論 77 參考資料 79

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